Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8911637 | Plasma-enhanced substrate processing method and apparatus | Rajinder Dhindsa, Alexei Marakhtanov, Andreas Fischer | 2014-12-16 |
| 8262847 | Plasma-enhanced substrate processing method and apparatus | Rajinder Dhindsa, Alexei Marakhtanov, Andreas Fischer | 2012-09-11 |
| 8222156 | Method and apparatus for processing a substrate using plasma | Rajindra Dhindsa, Alexei Marakhtanov, Andreas Fischer | 2012-07-17 |