Issued Patents All Time
Showing 76–89 of 89 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8092721 | Deposition of ternary oxide films containing ruthenium and alkali earth metals | Satoko Gatineau, Julien Gatineau | 2012-01-10 |
| 8088938 | Low decomposition storage of a tantalum precursor | Nathan Stafford, Olivier Letessier, Ravi Laxman | 2012-01-03 |
| 8076243 | Metal precursors for deposition of metal-containing films | Clément Lansalot-Matras, Vincent M. Omarjee, Cheng-Fang Hsiao | 2011-12-13 |
| 8071163 | Deposition of Ta- or Nb-doped high-k films | — | 2011-12-06 |
| 7972975 | Method for forming a dielectric film and novel precursors for implementing said method | — | 2011-07-05 |
| 7951711 | Metal precursors for semiconductor applications | — | 2011-05-31 |
| 7807223 | Precursors having open ligands for ruthenium containing films deposition | Julien Gatineau | 2010-10-05 |
| 7544389 | Precursor for film formation and method for forming ruthenium-containing film | Kazutaka Yanagita, Julien Gatineau | 2009-06-09 |
| 7482286 | Method for forming dielectric or metallic films | Ashutosh Misra, Matthew Fisher, Benjamin Jurcik, Eri Tsukada, Jean-Marc Girard | 2009-01-27 |
| 7351670 | Method for producing silicon nitride films and process for fabricating semiconductor devices using said method | Takeshi Hoshi, Tsuyoshi Saito, Takako Kimura, Kazutaka Yanagita | 2008-04-01 |
| 7192626 | Methods for producing silicon nitride films and silicon oxynitride films by thermal chemical vapor deposition | Jean-Marc Girard, Takako Kimura, Naoki Tamaoki, Yuusuke Sato | 2007-03-20 |
| 7064083 | Hexakis(monohydrocarbylamino)disilanes and method for the preparation thereof | Jean-Marc Girard | 2006-06-20 |
| 7019159 | Hexakis(monohydrocarbylamino) disilanes and method for the preparation thereof | Jean-Marc Girard | 2006-03-28 |
| 6936548 | Method for depositing silicon nitride films and silicon oxynitride films by chemical vapor deposition | Jean-Marc Girard | 2005-08-30 |