Issued Patents All Time
Showing 51–75 of 89 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8617649 | Cyclopentadienyl transition metal precursors for deposition of transition metal-containing films | Clément Lansalot-Matras | 2013-12-31 |
| 8613976 | Method of forming silicon oxide containing films | Ikuo Suzuki, Kazutaka Yanagita, Julien Gatineau, Eri Tsukada | 2013-12-24 |
| 8557339 | Method for the deposition of a Ruthenium containing film | Julien Gatineau | 2013-10-15 |
| 8507905 | Preparation of lanthanide-containing precursors and deposition of lanthanide-containing films | Venkateswara R. Pallem | 2013-08-13 |
| 8476465 | Deposition of Ta- or Nb-doped high-k films | — | 2013-07-02 |
| 8470402 | Method of depositing a metal-containing dielectric film | Nicolas Blasco, Audrey Pinchart, Christophe Lachaud | 2013-06-25 |
| 8470401 | Use of group V metal containing precursors for a process of depositing a metal containing film | Nicolas MERLE, Stéphane Danielle, Nicolas Blasco | 2013-06-25 |
| 8454928 | Tellurium precursors for GST deposition | — | 2013-06-04 |
| 8404878 | Titanium-containing precursors for vapor deposition | Venkateswara R. Pallem | 2013-03-26 |
| 8404306 | Method for the deposition of a ruthenium containing film | Julien Gatineau | 2013-03-26 |
| 8399056 | Method of forming high-k dielectric films based on novel titanium, zirconium, and hafnium precursors and their use for semiconductor manufacturing | Nicolas Blasco | 2013-03-19 |
| 8377511 | Method for depositing silicon nitride films and/or silicon oxynitride films by chemical vapor deposition | — | 2013-02-19 |
| 8372473 | Cobalt precursors for semiconductor applications | — | 2013-02-12 |
| 8367531 | Aluminum implant using new compounds | Vincent M. Omarjee, Jean-Marc Girard, Nicolas Blasco | 2013-02-05 |
| 8357430 | Method for producing silicon nitride films | Jean-Marc Girard, Takako Kimura | 2013-01-22 |
| 8349738 | Metal precursors for deposition of metal-containing films | Clément Lansalot-Matras, Vincent M. Omarjee, Cheng-Fang Hsiao | 2013-01-08 |
| 8343860 | High C content molecules for C implant | Vincent M. Omarjee, Jean-Marc Girard, Nicolas Blasco | 2013-01-01 |
| 8329583 | Metal precursors for semiconductor applications | — | 2012-12-11 |
| 8309174 | Heteroleptic iridium precursors to be used for the deposition of iridium-containing films | Julien Gatineau | 2012-11-13 |
| 8298616 | Heteroleptic cyclopentadienyl transition metal precursors for deposition of transition metal-containing films | Clément Lansalot-Matras | 2012-10-30 |
| 8283201 | Preparation of lanthanide-containing precursors and deposition of lanthanide-containing films | Venkateswara R. Pallem | 2012-10-09 |
| 8236979 | Methods for synthesis of heteroleptic cyclopentadienyl transition metal precursors | Clément Lansalot-Matras | 2012-08-07 |
| 8227032 | Method of forming silicon oxide containing films | Julien Gatineau, Kazutaka Yanagita, Eri Tsukada, Ikuo Suzuki | 2012-07-24 |
| 8193388 | Compounds for depositing tellurium-containing films | Benjamin J. Feist | 2012-06-05 |
| 8153832 | Pentakis(dimethylamino) disilane precursor comprising compound and method for the preparation thereof | — | 2012-04-10 |