Issued Patents All Time
Showing 51–75 of 163 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10044166 | CW DUV laser with improved stability | Xiaoxu Lu, John Fielden | 2018-08-07 |
| 10044164 | Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prisms | Xiaoxu Lu, Justin Dianhuan Liou, J. Joseph Armstrong, Yujun Deng, John Fielden | 2018-08-07 |
| 10032619 | High brightness laser-sustained plasma broadband source | Xiaoxu Lu, Justin Dianhuan Liou, John Fielden | 2018-07-24 |
| 9972959 | Semiconductor inspection and metrology system using laser pulse multiplier | J. Joseph Armstrong, Justin Dianhuan Liou, Vladimir Dribinski, David L. Brown | 2018-05-15 |
| 9966230 | Multi-column electron beam lithography including field emitters on a silicon substrate with boron layer | Yinying Xiao-Li, Xuefeng Liu, John Fielden | 2018-05-08 |
| 9935421 | 193nm laser and inspection system | J. Joseph Armstrong, Yujun Deng, Justin Dianhuan Liou, Vladimir Dribinski, John Fielden | 2018-04-03 |
| 9891177 | TDI sensor in a darkfield system | Jijen Vazhaeparambil, Guoheng Zhao, Daniel Kavaldjiev, Anatoly Romanovsky, Ivan Maleev +5 more | 2018-02-13 |
| 9865447 | High brightness laser-sustained plasma broadband source | Xiaoxu Lu, Justin Dianhuan Liou, John Fielden | 2018-01-09 |
| 9860466 | Sensor with electrically controllable aperture for inspection and metrology systems | John Fielden, David L. Brown, Jingjing Zhang, Keith Lyon, Mark Wang | 2018-01-02 |
| 9818887 | Back-illuminated sensor with boron layer | Jehn-Huar Chern, Ali R. Ehsani, Gildardo Delgado, David L. Brown, John Fielden | 2017-11-14 |
| 9804101 | System and method for reducing the bandwidth of a laser and an inspection system and method using a laser | Yujun Deng, John Fielden | 2017-10-31 |
| 9793673 | Semiconductor inspection and metrology system using laser pulse multiplier | J. Joseph Armstrong, Justin Dianhuan Liou, Vladimir Dribinski, David L. Brown | 2017-10-17 |
| 9768577 | Semiconductor inspection and metrology system using laser pulse multiplier | Justin Dianhuan Liou, J. Joseph Armstrong, Yujun Deng | 2017-09-19 |
| 9767986 | Scanning electron microscope and methods of inspecting and reviewing samples | David L. Brown, John Fielden, Marcel Trimpl, Jingjing Zhang, Devis Contarato +1 more | 2017-09-19 |
| 9748729 | 183NM laser and inspection system | J. Joseph Armstrong, Yujun Deng, Vladimir Dribinski, John Fielden, Jidong Zhang | 2017-08-29 |
| 9748294 | Anti-reflection layer for back-illuminated sensor | Masaharu Muramatsu, Hisanori Suzuki, Yasuhito Yoneta, Shinya Otsuka, Jehn-Huar Chem +3 more | 2017-08-29 |
| 9660409 | Low noise, high stability, deep ultra-violet, continuous wave laser | — | 2017-05-23 |
| 9620547 | Image sensor, an inspection system and a method of inspecting an article | Jingjing Zhang, John Fielden | 2017-04-11 |
| 9620341 | Photomultiplier tube, image sensor, and an inspection system using a PMT or image sensor | David L. Brown, John Fielden | 2017-04-11 |
| 9608399 | 193 nm laser and an inspection system using a 193 nm laser | J. Joseph Armstrong, Justin Dianhuan Liou, Vladimir Dribinski, John Fielden | 2017-03-28 |
| 9601299 | Photocathode including silicon substrate with boron layer | John Fielden | 2017-03-21 |
| 9529182 | 193nm laser and inspection system | J. Joseph Armstrong, Yujun Deng, Justin Dianhuan Liou, Vladimir Dribinski, John Fielden | 2016-12-27 |
| 9525265 | Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prisms | Xiaoxu Lu, Justin Dianhuan Liou, J. Joseph Armstrong, Yujun Deng, John Fielden | 2016-12-20 |
| 9509112 | CW DUV laser with improved stability | Xiaoxu Lu, John Fielden | 2016-11-29 |
| 9494531 | Multi-spot illumination for improved detection sensitivity | Xiaoxu Lu, John Fielden, Ivan Maleev | 2016-11-15 |