Issued Patents All Time
Showing 101–125 of 163 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8873054 | Metrology systems and methods | Daniel Kandel, Vladimir Levinski, Alexander Svizher, Joel Seligson, Andrew V. Hill +6 more | 2014-10-28 |
| 8873596 | Laser with high quality, stable output beam, and long life high conversion efficiency non-linear crystal | Vladimir Dribinski, J. Joseph Armstrong, John Fielden | 2014-10-28 |
| 8832611 | Process aware metrology | Xuefeng Liu, John Fielden, Bin-Ming Benjamin Tsai, Jingjing Zhang | 2014-09-09 |
| 8748828 | Interposer based imaging sensor for high-speed image acquisition and inspection systems | David L. Brown, Guowu Zheng, Venkatraman Iyer | 2014-06-10 |
| 8711896 | Alleviation of laser-induced damage in optical materials by suppression of transient color centers formation and control of phonon population | Vladimir Dribinski | 2014-04-29 |
| 8692986 | EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafers | Richard W. Solarz, David Shafer, Bin-Ming Benjamin Tsai, David L. Brown | 2014-04-08 |
| 8675188 | Method and system for determining one or more optical characteristics of structure of a semiconductor wafer | Xuefeng Liu, John Fielden | 2014-03-18 |
| 8675276 | Catadioptric imaging system for broad band microscopy | David Shafer, J. Joseph Armstrong | 2014-03-18 |
| 8643840 | Cell for light source | Kenneth P. Gross, John Fielden | 2014-02-04 |
| 8624971 | TDI sensor modules with localized driving and signal processing circuitry for high speed inspection | David L. Brown | 2014-01-07 |
| 8553217 | EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafers | Richard W. Solarz, David Shafer, Bin-Ming Benjamin Tsai, David L. Brown | 2013-10-08 |
| 8468471 | Process aware metrology | Xuefeng Liu, John Fielden, Bin-Ming Benjamin Tsai, Jingjing Zhang | 2013-06-18 |
| 8441639 | Metrology systems and methods | Daniel Kandel, Vladimir Levinski, Alexander Svizher, Joel Seligson, Andrew V. Hill +6 more | 2013-05-14 |
| 7957066 | Split field inspection system using small catadioptric objectives | J. Joseph Armstrong | 2011-06-07 |
| 7952633 | Apparatus for continuous clocking of TDI sensors | David L. Brown, Kai Cao | 2011-05-31 |
| 7924892 | Fiber amplifier based light source for semiconductor inspection | J. Joseph Armstrong | 2011-04-12 |
| 7869121 | Small ultra-high NA catadioptric objective using aspheric surfaces | David Shafer, J. Joseph Armstrong | 2011-01-11 |
| 7817260 | Beam delivery system for laser dark-field illumination in a catadioptric optical system | J. Joseph Armstrong | 2010-10-19 |
| 7773296 | Ultra-broadband UV microscope imaging system with wide range zoom capability | David Shafer, Bin-Ming Benjamin Tsai | 2010-08-10 |
| 7728968 | Excimer laser inspection system | Bin-Ming Benjamin Tsai, J. Joseph Armstrong, David L. Brown | 2010-06-01 |
| 7679842 | High performance catadioptric imaging system | David Shafer, J. Joseph Armstrong | 2010-03-16 |
| 7672043 | Catadioptric imaging system exhibiting enhanced deep ultraviolet spectral bandwidth | J. Joseph Armstrong, David Shafer | 2010-03-02 |
| 7646533 | Small ultra-high NA catadioptric objective | David Shafer, J. Joseph Armstrong | 2010-01-12 |
| 7639419 | Inspection system using small catadioptric objective | J. Joseph Armstrong, David Shafer | 2009-12-29 |
| 7633675 | Catadioptric imaging system employing immersion liquid for use in broad band microscopy | J. Joseph Armstrong, David Shafer | 2009-12-15 |