Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10474040 | Systems and methods for device-correlated overlay metrology | Frank Laske, Ulrich Pohlmann, Stefan Eyring | 2019-11-12 |
| 10379449 | Identifying process variations during product manufacture | Tzahi Grunzweig, Claire E. Staniunas, Tal Marciano, Nimrod Shuall | 2019-08-13 |
| 10197922 | Focus metrology and targets which utilize transformations based on aerial images of the targets | Yoel Feler, Vladimir Levinski, Oded Kaminsky | 2019-02-05 |
| 9934353 | Focus measurements using scatterometry metrology | Mohamed El Kodadi, Nuriel Amir, Roie Volkovich, Vladimir Levinski, Yoel Feler +3 more | 2018-04-03 |
| 9841689 | Approach for model calibration used for focus and dose measurement | Vladimir Levinski, Daniel Kandel, Yoel Feler | 2017-12-12 |