Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11939666 | Methods and apparatus for precleaning and treating wafer surfaces | Xiangjin Xie, Carmen Leal Cervantes, Feng Chen, Wenjing Xu, Aravind Kamath +4 more | 2024-03-26 |
| 11680313 | Selective deposition on non-metallic surfaces | Sang Ho Yu, Seshadri Ganguli | 2023-06-20 |
| 10930550 | Barrier for copper metallization and methods of forming | Seshadri Ganguli, Sang Ho Yu | 2021-02-23 |
| 10605744 | Systems and methods for detecting defects on a wafer | Jason Kirkwood, Mohan Mahadevan, James A. Smith, Lisheng Gao, Junqing Huang +2 more | 2020-03-31 |
| 9880107 | Systems and methods for detecting defects on a wafer | Jason Kirkwood, Mohan Mahadevan, James A. Smith, Lisheng Gao, Junqing Huang +2 more | 2018-01-30 |
| 9523646 | Wafer and reticle inspection systems and methods for selecting illumination pupil configurations | Grace Hsiu-Ling Chen, Rudolf Brunner, Lisheng Gao, Robert M. Danen | 2016-12-20 |
| 9347891 | Wafer and reticle inspection systems and methods for selecting illumination pupil configurations | Grace Hsiu-Ling Chen, Rudolf Brunner, Lisheng Gao, Robert M. Danen | 2016-05-24 |
| 8605275 | Detecting defects on a wafer | Qiang Zhang | 2013-12-10 |
| 8467047 | Systems and methods for detecting defects on a wafer | Jason Kirkwood, Mohan Mahadevan, James A. Smith, Lisheng Gao, Junqing Huang +2 more | 2013-06-18 |
| 8223327 | Systems and methods for detecting defects on a wafer | Jason Kirkwood, Mohan Mahadevan, James A. Smith, Lisheng Gao, Junqing Huang +2 more | 2012-07-17 |
| 6722022 | Apparatus for calibrating the position of a wafer platform in an ion implanter | Yu-Chun Peng, Yi Tang | 2004-04-20 |
| 6696689 | Method and apparatus for avoiding driver gas contamination in an ion implanter gas supply module | — | 2004-02-24 |
| 6605812 | Method reducing the effects of N2 gas contamination in an ion implanter | Su-Yu Yeh, Chi-Bing Chen, Cheng-Yi Huang, Chao-Jie Tsai, Hsing-Jui Lee | 2003-08-12 |