Issued Patents All Time
Showing 25 most recent of 45 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362158 | Method for OES data collection and endpoint detection | Sergey Voronin, Blaze Messer, Joel Ng, Ashawaraya Shalini, Ying Zhu +1 more | 2025-07-15 |
| 12306044 | Optical emission spectroscopy for advanced process characterization | Sergey Voronin, Blaze Messer, Joel Ng, Ashawaraya Shalini, Ying Zhu +1 more | 2025-05-20 |
| 12165937 | Optical diagnostics of semiconductor process using hyperspectral imaging | Xinkang Tian | 2024-12-10 |
| 12158374 | Time-resolved OES data collection | Sergey Voronin, Andrej Mitrovic, Blaze Messer, Joel Ng, Ashawaraya Shalini +2 more | 2024-12-03 |
| 11763161 | Enhanced resolution in semiconductor fabrication data acquisition instruments using machine learning | Xinkang Tian, Zheng Yan | 2023-09-19 |
| 11692874 | Peak alignment for the wavelength calibration of a spectrometer | Xinkang Tian | 2023-07-04 |
| 11538722 | Optical diagnostics of semiconductor process using hyperspectral imaging | Xinkang Tian | 2022-12-27 |
| 11538723 | Optical diagnostics of semiconductor process using hyperspectral imaging | Xinkang Tian | 2022-12-27 |
| 11422058 | Digital laser holography-based rapid lens center offset detection device | Xiaojin Yu, Dexiang Zeng | 2022-08-23 |
| 10910201 | Synthetic wavelengths for endpoint detection in plasma etching | Xinkang Tian, Vi Vuong | 2021-02-02 |
| 10837902 | Optical sensor for phase determination | Ivan Maleev, Mihail Mihaylov, Hanyou Chu, Ching-Ling Meng, Qionglin Gao +1 more | 2020-11-17 |
| 10784982 | Method and system for allocating wavelength channels in passive optical network, and optical line terminal | Xiaohua Wang, Shuang Zhang, Dandan Zhang, Haiming Ouyang, Xiangrong Chen +1 more | 2020-09-22 |
| 10473525 | Spatially resolved optical emission spectroscopy (OES) in plasma processing | Ching-Ling Meng, Holger Tuitje, Mihail Mihaylov | 2019-11-12 |
| 10453653 | Endpoint detection algorithm for atomic layer etching (ALE) | Xinkang Tian, Jason Ferns | 2019-10-22 |
| 10332861 | Interconnection structures and methods for making the same | Cheng-Heng Kao, Han-Tang Hung, Chun-Hsiang Yang | 2019-06-25 |
| 10205520 | Method and device for measuring optical signal-to-noise ratio | Shuang Chen, Liping Sun, Qianggao Hu, Hui Xie, Qingyan Yue +3 more | 2019-02-12 |
| 10133081 | Beam splitter, laser generator and excimer laser annealing apparatus | Xiangjun Tian | 2018-11-20 |
| 10002804 | Method of endpoint detection of plasma etching process using multivariate analysis | Vi Vuong, Serguei Komarov | 2018-06-19 |
| 9970818 | Spatially resolved optical emission spectroscopy (OES) in plasma processing | Junwei Bao, Ching-Ling Meng, Holger Tuitje, Mihail Mihaylov, Zheng Yan +2 more | 2018-05-15 |
| 9857558 | Optical imaging lens | Matthew Bone, Bai Na Chen, Feng Chen | 2018-01-02 |
| 9851532 | Mobile device and optical imaging lens thereof | Shih-Han Chen, Baina Chen | 2017-12-26 |
| 9798108 | Mobile device and optical imaging lens thereof | Shih-Han Chen, Ta-Cheng Fan | 2017-10-24 |
| 9786634 | Interconnection structures and methods for making the same | Cheng-Heng Kao, Han-Tang Hung, Chun-Hsiang Yang | 2017-10-10 |
| 9772471 | Mobile device and optical imaging lens thereof | Shih-Han Chen, Long Ye | 2017-09-26 |
| 9645360 | Mobile device and optical imaging lens thereof | Shih-Han Chen, Feng Chen | 2017-05-09 |