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Hafnium aluminum oxide coatings deposited by atomic layer deposition |
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Methods of making nanopowders, nanoceramic materials and nanoceramic components |
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Methods of making nanopowders, nanoceramic materials and nanoceramic components |
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Corrosion resistant ground shield of processing chamber |
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Erosion resistant metal silicate coatings |
Cheng-Hsuan Chou, Jennifer Y. Sun |
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Nanopowders, nanoceramic materials and methods of making and use thereof |
Guodong Zhan, Xiaowei Wu, Jennifer Y. Sun |
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Plasma resistant multi-layer architecture for high aspect ratio parts |
Jennifer Y. Sun |
2020-12-08 |
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Methods of minimizing particles on wafer from plasma spray coatings |
Kaushal Gangakhedkar, Jennifer Y. Sun |
2020-09-08 |
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Multi-layer plasma erosion protection for chamber components |
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Method for labeling fabrics and heat-transfer label well-suited for use in said method |
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Label assembly and method of using the same to label articles durably yet removably |
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Heat-transfer label well-suited for labeling fabrics and methods of making and using the same |
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Heat-transfer label well-suited for labeling fabrics and methods of making and using the same |
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Label assembly and method of using the same to label articles durably yet removably |
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Plasma resistant coatings for plasma chamber components |
Jennifer Y. Sun, Senh Thach |
2012-06-26 |
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Label assembly and method of using the same to label articles durably yet removably |
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Heat transfer label for fabric with thermochromic ink and adhesive surface roughness |
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Method for roll-to-roll deposition of optically transparent and high conductivity metallic thin films |
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2010-09-14 |
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Label assembly and method of using the same to label articles durably yet removably |
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Transparent conductive film for flat panel displays |
Yukihiko Sasaki |
2007-05-15 |
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Method for roll-to-roll deposition of optically transparent and high conductivity metallic thin films |
Ramin Heydarpour |
2004-11-02 |
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Optically transparent, scratch-resistant, diamond-like carbon coatings |
Deok-Hyung Lee, Michael Nastasi, Kevin Walter, Michel Tuszewski |
2003-06-03 |
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Method for producing fluorinated diamond-like carbon films |
Marko Hakovirta, Michael Nastasi, Deok-Hyung Lee |
2003-06-03 |
