Issued Patents All Time
Showing 25 most recent of 56 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12246931 | Wafer transfer device and wafer transfer method | Tianyao Wu, Hao Wang, Tao Miao | 2025-03-11 |
| 12146219 | Flow control features of CVD chambers | Kien N. Chuc, Qiwei Liang, Hanh Nguyen, Matthew L. Miller, Soonam Park +5 more | 2024-11-19 |
| 12098783 | Gas flow control valve and mounting method for gas flow control valve | Jianguo Xu, Jiazhong Wu, Haishui Han, Na Zhang | 2024-09-24 |
| 12100606 | Wafer transfer device and wafer transfer method | Tianyao Wu, Hao Wang, Tao Miao | 2024-09-24 |
| 12038344 | Phase power device and fluid experiment system | Qingjie Liu, Jiazhong Wu, Haishui Han, Hongwei Yu | 2024-07-16 |
| 11898268 | Calcium metaborate birefringent crystal, preparation method and use thereof | Shilie Pan, Fangfang Zhang | 2024-02-13 |
| 11428065 | Borehole wall resistance increasing apparatus for improving energy utilization rate of injection gas | Qingxin Song, Zhidong Yang, Shanyan Zhang, Zemin Ji, Yulong Pu | 2022-08-30 |
| 11377941 | Gasflow distribution device, gas distributor, pipe string and method for separate-layer gas injection | Jingyao Wang, Chengming Zhang, Shitou Wang, Jiazhong Wu, Zhong Ren | 2022-07-05 |
| 11344824 | Ultrasonic microbubble generation method, apparatus and system | Hongwei Yu, Shi-Lin Li, Haishui Han, Zemin Ji | 2022-05-31 |
| 11264213 | Chemical control features in wafer process equipment | Qiwei Liang, Kien N. Chuc, Dmitry Lubomirsky, Soonam Park, Jang-Gyoo Yang +4 more | 2022-03-01 |
| 11179683 | Microbubble generation device and equipment | Jiazhong Wu, Haishui Han, Shi-Lin Li, Hongwei Yu, Zemin Ji | 2021-11-23 |
| 11098569 | System and method of performing oil displacement by water-gas dispersion system | Jiazhong Wu, Hongwei Yu, Shi-Lin Li, Haishui Han | 2021-08-24 |
| 11024486 | Semiconductor processing systems having multiple plasma configurations | Dmitry Lubomirsky, Shankar Venkataraman | 2021-06-01 |
| 10604863 | Lithium metaborate crystal, preparation method and use thereof | Shilie Pan, Fangfang Zhang, Xueling Hou | 2020-03-31 |
| 10550472 | Flow control features of CVD chambers | Kien N. Chuc, Qiwei Liang, Hanh Nguyen, Matthew L. Miller, Soonam Park +5 more | 2020-02-04 |
| 10529618 | Methods of manufacturing a semiconductor device | Siqing Lu, Sang-Hoon Ahn, Ki Hyun Kim, Kyu In Shim | 2020-01-07 |
| 10504697 | Particle generation suppresor by DC bias modulation | Jonghoon Baek, Soonam Park, Dmitry Lubomirsky | 2019-12-10 |
| 10424485 | Enhanced etching processes using remote plasma sources | Nitin K. Ingle, Dmitry Lubomirsky, Shankar Venkataraman | 2019-09-24 |
| 10354843 | Chemical control features in wafer process equipment | Qiwei Liang, Kien N. Chuc, Dmitry Lubomirsky, Soonam Park, Jang-Gyoo Yang +4 more | 2019-07-16 |
| 10283321 | Semiconductor processing system and methods using capacitively coupled plasma | Jang-Gyoo Yang, Matthew L. Miller, Kien N. Chuc, Qiwei Liang, Shankar Venkataraman +1 more | 2019-05-07 |
| 10256079 | Semiconductor processing systems having multiple plasma configurations | Dmitry Lubomirsky, Shankar Venkataraman | 2019-04-09 |
| 10170282 | Insulated semiconductor faceplate designs | Dmitry Lubomirsky, Shankar Venkataraman | 2019-01-01 |
| 10062587 | Pedestal with multi-zone temperature control and multiple purge capabilities | Jang-Gyoo Yang, Alexander Tam, Elisha Tam | 2018-08-28 |
| 10056233 | RPS assisted RF plasma source for semiconductor processing | Saurabh Garg, Jang-Gyoo Yang | 2018-08-21 |
| 10032606 | Semiconductor processing with DC assisted RF power for improved control | Jang-Gyoo Yang, Soonam Park, Jonghoon Baek, Saurabh Garg, Shankar Venkataraman | 2018-07-24 |