Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10146132 | Mobile dispense device for chemicals used in micro-processing | Sidheswara Mahapatra, Heiko Wagner | 2018-12-04 |
| 9798244 | Methods, apparatus, and systems for minimizing defectivity in top-coat-free lithography and improving reticle CD uniformity | Arthur Hotzel, Philipp Jaschinsky, Remi Riviere | 2017-10-24 |
| 7887978 | Method of detecting repeating defects in lithography masks on the basis of test substrates exposed under varying conditions | Uwe Griebenow, Martin Mazur, Andre Poock | 2011-02-15 |
| 6759179 | Methods and systems for controlling resist residue defects at gate layer in a semiconductor device manufacturing process | Khoi A. Phan, Jeffrey P. Erhardt, Jerry Cheng, Richard Bartlett, Anthony P. Coniglio +3 more | 2004-07-06 |
| 6649525 | Methods and systems for controlling resist residue defects at gate layer in a semiconductor device manufacturing process | Khoi A. Phan, Jeffrey P. Erhardt, Jerry Cheng, Richard Bartlett, Anthony P. Coniglio +3 more | 2003-11-18 |
| 6605546 | Dual bake for BARC fill without voids | Ramkumar Subramanian, Bhanwar Singh, Christopher F. Lyons, Marina V. Plat | 2003-08-12 |
| 5993664 | Method for producing a material for heavy metal absorption or for analytically detecting heavy metals | Thomas Streil, Gunther Just | 1999-11-30 |