Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12345522 | Computer system, dimension measurement method, and storage medium | Yutaka Okuyama | 2025-07-01 |
| 12320630 | Dimension measurement apparatus, semiconductor manufacturing apparatus, and semiconductor device manufacturing system | Pushe ZHAO, Yutaka Okuyama | 2025-06-03 |
| 12222690 | Process recipe search apparatus, etching recipe search method and semiconductor device manufacturing system | Takashi Dobashi, Hiroyuki Kobayashi | 2025-02-11 |
| 12094146 | Contour analysis apparatus, processing condition determination system, shape estimation system, semiconductor device manufacturing system, search apparatus, and data structure used in them | Hyakka Nakada, Naoto Takano | 2024-09-17 |
| 11907235 | Plasma processing apparatus including predictive control | Yutaka Okuyama, Masaru Kurihara, Hyakka Nakada | 2024-02-20 |
| 11747774 | Search device, search program, and plasma processing apparatus | Yutaka Okuyama | 2023-09-05 |
| 11663713 | Image generation system | Yutaka Okuyama | 2023-05-30 |
| 11657059 | Search device, searching method, and plasma processing apparatus | Yutaka Okuyama, Masaru Kurihara, Hyakka Nakada | 2023-05-23 |
| 11609188 | Processing condition determination system and processing condition searching method | Hyakka Nakada | 2023-03-21 |
| 11600536 | Dimension measurement apparatus, dimension measurement program, and semiconductor manufacturing system | Yutaka Okuyama, Yasutaka Toyoda | 2023-03-07 |
| 11393084 | Processing recipe generation device | Masayoshi Ishikawa, Hyakka Nakada | 2022-07-19 |
| 11287782 | Computer, method for determining processing control parameter, substitute sample, measurement system, and measurement method | Hyakka Nakada, Masaru Kurihara, Tatehito Usui, Naoyuki Kofuji | 2022-03-29 |
| 11189470 | Search device, search method and plasma processing apparatus | Hyakka Nakada, Naoyuki Kofuji, Masayoshi Ishikawa, Masaru Kurihara | 2021-11-30 |
| 11152237 | Substitute sample, method for determining control parameter of processing, and measurement system | Hyakka Nakada, Tatehito Usui, Masaru Kurihara, Naoyuki Kofuji | 2021-10-19 |
| 11112775 | System and method of determining processing condition | Hyakka Nakada, Tatehito Usui, Masaru Kurihara | 2021-09-07 |
| 10734261 | Search apparatus and search method | Junichi Tanaka, Hikaru Koyama, Masaru Kurihara | 2020-08-04 |
| 10672595 | Plasma processing apparatus and operation method thereof | Daisuke Satou, Tatehito Usui, Satomi Inoue, Kenji Maeda | 2020-06-02 |
| 10665516 | Etching method and plasma processing apparatus | Miyako Matsui, Kenichi Kuwahara, Naoki Yasui, Masaru Izawa, Tatehito Usui | 2020-05-26 |
| 10627788 | Retrieval apparatus and retrieval method for semiconductor device processing | Hyakka Nakada, Masayoshi Ishikawa, Masaru Kurihara | 2020-04-21 |
| 10453695 | Plasma processing apparatus and plasma processing method | Soichiro Eto, Tatehito Usui, Satomi Inoue | 2019-10-22 |
| 10008370 | Plasma processing apparatus and operation method thereof | Daisuke Satou, Tatehito Usui, Satomi Inoue, Kenji Maeda | 2018-06-26 |
| 8486291 | Plasma processing method | Yasuhiro Nishimori, Hiroaki Ishimura, Hitoshi Kobayashi, Masamichi Sakaguchi | 2013-07-16 |
| 7660269 | Apparatus, method, and program for creating network configuration information | Kentaro Aoki, Kunio Okuda, Yukinobu Moriya, Hideo Yasuniwa | 2010-02-09 |
| 6061220 | Power switching circuit of network-connected device | Kenji Oguma | 2000-05-09 |
| 5863678 | Photopolymerizable composition for a color filter | Toshiyuki Urano, Shingo Ikeda, Etsuko Hino, Shin Kawana, Koji Mori | 1999-01-26 |