Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12222690 | Process recipe search apparatus, etching recipe search method and semiconductor device manufacturing system | Hiroyuki Kobayashi, Takeshi Ohmori | 2025-02-11 |
| 11791131 | Charged particle beam apparatus and method for controlling charged particle beam apparatus | Hirokazu Tamaki, Hiromi Mise, Shuntaro ITO | 2023-10-17 |
| 11756764 | Charged particle beam apparatus and method of controlling charged particle beam apparatus | Hirokazu Tamaki, Kuniyasu Nakamura, Hiromi Mise | 2023-09-12 |
| 11742172 | Charged particle beam device and control method thereof | Hirokazu Tamaki, Hiromi Mise | 2023-08-29 |
| 11380518 | Measurement system and method for setting observation conditions of measurement apparatus | Takafumi Miwa, Hirokazu Tamaki, Momoyo Enyama, Makoto Sakakibara, Sayaka KURATA +6 more | 2022-07-05 |
| 11177108 | Charged particle beam application apparatus | Yasuhiro Shirasaki, Momoyo Enyama, Akira Ikegami, Yuta Kawamoto | 2021-11-16 |
| 10636621 | Charged particle beam device for moving an aperture having plurality of openings and sample observation method | Akinari HANAWA, Hideki Kikuchi, Yoshifumi Taniguchi, Toshie Yaguchi, Keitaro Watanabe +1 more | 2020-04-28 |