Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12320630 | Dimension measurement apparatus, semiconductor manufacturing apparatus, and semiconductor device manufacturing system | Takeshi Ohmori, Yutaka Okuyama | 2025-06-03 |
| 10789120 | Preprocessor and abnormality predictor diagnosis system | Masaru Kurihara, Toujirou NODA, Shigeyoshi CHIKUMA | 2020-09-29 |
| 10496466 | Preprocessor of abnormality sign diagnosing device and processing method of the same | Junichi Tanaka, Masaru Kurihara, Toujirou NODA, Shigeyoshi CHIKUMA | 2019-12-03 |