Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12381071 | Plasma processing method and plasma processing apparatus | Mitsuru Nagasawa, Soichiro Eto, Tatehito Usui | 2025-08-05 |
| 12368031 | Plasma processing method | Kosa Hirota, Masahiro Sumiya, Koichi Nakaune, Nanako Tamari, Satomi Inoue | 2025-07-22 |
| 12131964 | Plasma processing apparatus and plasma processing method | Kousuke Fukuchi, Ryoji Asakura, Soichiro Eto, Tsubasa Okamoto, Tatehito Usui | 2024-10-29 |
| 12062530 | Vacuum processing apparatus and vacuum processing method | Yusuke Yoshida, Kosuke Fukuchi, Ryoji Asakura | 2024-08-13 |
| 12051574 | Wafer processing method and plasma processing apparatus | Hiroyuki Kobayashi, Atsushi Sekiguchi, Tatehito Usui, Soichiro Eto, Kazunori Shinoda +1 more | 2024-07-30 |
| 11875978 | Plasma processing apparatus and plasma processing method | Tsubasa Okamoto, Tatehito Usui, Miyako Matsui, Naohiro Kawamoto, Atsushi Sekiguchi | 2024-01-16 |
| 11605530 | Plasma processing apparatus, data processing apparatus and data processing method | Seiichi Watanabe, Satomi Inoue, Kousuke Fukuchi | 2023-03-14 |
| 11569135 | Plasma processing method and wavelength selection method used in plasma processing | Yohei Kawaguchi, Tatehito Usui | 2023-01-31 |
| 11437289 | Plasma processing apparatus and plasma processing method | Kousuke Fukuchi, Ryoji Asakura, Soichiro Eto, Tsubasa Okamoto, Tatehito Usui | 2022-09-06 |
| 11424110 | Plasma processing apparatus and operational method thereof | Masahito Togami, Tatehito Usui, Kosa Hirota, Satomi Inoue | 2022-08-23 |
| 11355324 | Plasma processing method | Kosa Hirota, Masahiro Sumiya, Koichi Nakaune, Nanako Tamari, Satomi Inoue | 2022-06-07 |
| 11308182 | Data processing method, data processing apparatus and processing apparatus | Seiichi Watanabe, Satomi Inoue, Kousuke Fukuchi | 2022-04-19 |
| 10872774 | Plasma processing apparatus and plasma processing method | Hao Xu, Hiroshige Uchida, Kousuke Fukuchi, Satomi Inoue | 2020-12-22 |
| 10783220 | Data processing method, data processing apparatus and processing apparatus | Seiichi Watanabe, Satomi Inoue, Kousuke Fukuchi | 2020-09-22 |
| 10615010 | Plasma processing apparatus, data processing apparatus and data processing method | Seiichi Watanabe, Satomi Inoue, Kousuke Fukuchi | 2020-04-07 |
| 10262840 | Plasma processing apparatus | Akira Kagoshima, Daisuke Shiraishi, Satomi Inoue, Shoji Ikuhara, Toshihiro Morisawa | 2019-04-16 |
| 10073818 | Data processing method, data processing apparatus and processing apparatus | Seiichi Watanabe, Satomi Inoue, Kousuke Fukuchi | 2018-09-11 |
| 10020233 | Plasma processing apparatus and plasma processing method | Tatehito Usui, Satomi Inoue, Kousa Hirota, Kousuke Fukuchi | 2018-07-10 |
| 9934946 | Plasma processing apparatus and operating method of plasma processing apparatus | Yohei Kawaguchi, Tatehito Usui, Masahito Togami, Satomi Inoue | 2018-04-03 |
| 9865439 | Plasma processing apparatus | Tatehito Usui, Satomi Inoue, Kousuke Fukuchi | 2018-01-09 |
| 9805940 | Plasma processing apparatus and plasma processing method | Kousuke Fukuchi, Tatehito Usui, Satomi Inoue | 2017-10-31 |
| 9767997 | Plasma processing apparatus and operational method thereof | Masahito Togami, Tatehito Usui, Kosa Hirota, Satomi Inoue | 2017-09-19 |
| 9741629 | Plasma processing apparatus and plasma processing method | Tatehito Usui, Kosa Hirota, Satomi Inoue, Kousuke Fukuchi | 2017-08-22 |
| 9190336 | Plasma processing apparatus and plasma processing method | Kousuke Fukuchi, Tatehito Usui, Satomi Inoue, Kousa Hirota | 2015-11-17 |
| 8992721 | Plasma processing apparatus | Akira Kagoshima, Daisuke Shiraishi, Satomi Inoue, Shoji Ikuhara, Toshihiro Morisawa | 2015-03-31 |