Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8784677 | Plasma processing apparatus and plasma processing method | Daisuke Shiraishi, Akira Kagoshima, Satomi Inoue | 2014-07-22 |
| 7047093 | Semiconductor manufacturing apparatus and its diagnosis apparatus and operating system | Hideaki Kondo, Juntaro Arima | 2006-05-16 |
| 6920369 | Methods of operating vacuum processing equipment and methods of processing wafers | Tooru Ueno, Shoji Okiguchi, Hideki Yamasaki, Kouji Nishihata | 2005-07-19 |
| 6901306 | Semiconductor manufacturing apparatus and its diagnosis apparatus and operating system | Hideaki Kondo, Juntaro Arima | 2005-05-31 |
| 6795745 | Methods of operating vacuum processing equipment and methods of processing wafers | Tooru Ueno, Shoji Okiguchi, Hideki Yamasaki, Kouji Nishihata | 2004-09-21 |
| 6596551 | Etching end point judging method, etching end point judging device, and insulating film etching method using these methods | Tatehito Usui, Ken Yoshioka, Shoji Ikuhara, Kouji Nishihata, Kazue Takahashi +1 more | 2003-07-22 |