Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7130038 | Method and apparatus for optical film measurements in a controlled environment | Fredrik Maurer, Paul Smith, Theodore G. van Kessel, Hematha K. Wickramasinghe | 2006-10-31 |
| 6967715 | Method and apparatus for optical film measurements in a controlled environment | Fredrik Maurer, Paul Smith, Theodore G. van Kessel, Hematha K. Wickramasinghe | 2005-11-22 |
| 6738142 | Integrated wafer cassette metrology assembly | Theodore G. van Kessel, Hematha K. Wickramasinghe | 2004-05-18 |
| 6579149 | Support and alignment device for enabling chemical mechanical polishing rinse and film measurements | Frederic Maurer, Rock Nadeau, Paul Smith, Hemantha K. Wickramasinghe, Theodore G. van Kessel | 2003-06-17 |
| 6567172 | System and multipass probe for optical interference measurements | Philip Charles Danby Hobbs, Martin P. O'Boyle, Theodore G. van Kessel, Hemantha K. Wickramasinghe | 2003-05-20 |
| 6334807 | Chemical mechanical polishing in-situ end point system | Rock Nadeau, Martin P. O'Boyle, Paul Smith, Theodore G. van Kessel, Hemantha K. Wickramasinghe | 2002-01-01 |
| 6319093 | Chemical-mechanical polishing system and method for integrated spin dry-film thickness measurement | Frederic Maurer, Rock Nadeau, Paul Smith, Hemantha K. Wickramasinghe, Theodore G. van Kessel | 2001-11-20 |
| 6247368 | CMP wet application wafer sensor | Scott R. Cline, Willi O. Kalvaitis, Charles A. McKinney, Douglas P. Nadeau, Theodore G. van Kessel | 2001-06-19 |
| 6022266 | In-situ pad conditioning process for CMP | Timothy Scott Bullard, Rock Nadeau, Paul Smith | 2000-02-08 |
| 5885135 | CMP wafer carrier for preferential polishing of a wafer | Daniel D. Desorcie, Charles A. McKinney, Rock Nadeau, Timothy J. Rickard, Jr., Paul Smith +2 more | 1999-03-23 |
| 5849629 | Method of forming a low stress polycide conductors on a semiconductor chip | Anthony K. Stamper, Gary L. Langdeau | 1998-12-15 |
| 5738568 | Flexible tilted wafer carrier | Robert A. Jurjevic, Matthew Miller | 1998-04-14 |
| 5381234 | Method and apparatus for real-time film surface detection for large area wafers | Steven G. Barbee, Tony F. Heinz, Leping Li, Victor J. Silvestri | 1995-01-10 |