Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6352596 | Post CMP cleaning method using a brush cleaner with torque monitor | Gary J. Beardsley, Cuc K. Huynh, Theodore G. van Kessel, David Walker | 2002-03-05 |
| 6269510 | Post CMP clean brush with torque monitor | Gary J. Beardsley, Cuc K. Huynh, Theodore G. van Kessel, David Walker | 2001-08-07 |
| 6022266 | In-situ pad conditioning process for CMP | Richard J. Lebel, Rock Nadeau, Paul Smith | 2000-02-08 |