| 9478237 |
Work piece contact pad with centering feature |
Jeffrey R. O'Konski, Saravuth Keo, Pramit P. Parikh |
2016-10-25 |
$12,475,000 |
| 9352442 |
Lapping carrier |
Kim Sek Tan, Choong Kit Mah, Soo Chun Loh, Choon Yen Lim, Chin Chong Yew +1 more |
2016-05-31 |
$8,175,000 |
| 9308622 |
Lapping head with a sensor device on the rotating lapping head |
Andrew S. Menz, John F. L. Schmidt, Stephen Mackin |
2016-04-12 |
$6,087,000 |
| 9115980 |
Row bar thickness measurement device, system and methods |
Sarah R. Marotz, Kara L. Maytag |
2015-08-25 |
$8,541,000 |
| 8767351 |
Ambient temperature ball bond |
Saravuth Keo, Kara L. Maytag, Pramit P. Parikh, Jeff O'Konski, Mark Allen Herendeen +6 more |
2014-07-01 |
$17,445,000 |
| 6989683 |
Enhanced endpoint detection for wet etch process control |
Steven G. Barbee |
2006-01-24 |
$7,705,000 |
| 6899784 |
Apparatus for detecting CMP endpoint in acidic slurries |
Steven G. Barbee, Scott R. Cline, James Albert Gilhooly, Walter Imfeld, Werner Moser +4 more |
2005-05-31 |
$8,494,000 |
| 6878629 |
Method for detecting CMP endpoint in acidic slurries |
Steven G. Barbee, Scott R. Cline, James Albert Gilhooly, Xinhui Wang, Cong Wei |
2005-04-12 |
$5,340,000 |
| 6843880 |
Enhanced endpoint detection for wet etch process control |
Steven G. Barbee |
2005-01-18 |
$12,326,000 |
| 6835117 |
Endpoint detection in chemical-mechanical polishing of patterned wafers having a low pattern density |
Xinhui Wang, Yingru Gu, Hung-Chin Guthrie |
2004-12-28 |
$11,084,000 |
| 6741913 |
Technique for noise reduction in a torque-based chemical-mechanical polishing endpoint detection system |
Xinhui Wang, Yingru Gu |
2004-05-25 |
$11,301,000 |
| 6506341 |
Chemiluminescence detection apparatus |
James Albert Gilhooly, Clifford Owen Morgan, III, Cong Wei, Werner Moser, Matthias Kutter +4 more |
2003-01-14 |
$20,025,000 |
| 6440263 |
Indirect endpoint detection by chemical reaction and chemiluminescence |
James Albert Gilhooly, Clifford Owen Morgan, III, William Joseph Surovic, Cong Wei |
2002-08-27 |
$8,564,000 |
| 6419785 |
Endpoint detection by chemical reaction |
James Albert Gilhooly, Clifford Owen Morgan, III, Cong Wei, Chienfan Yu |
2002-07-16 |
$9,944,000 |
| 6291351 |
Endpoint detection in chemical-mechanical polishing of cloisonne structures |
Steven G. Barbee, Eric James Lee, Francisco Martin, Cong Wei |
2001-09-18 |
$29,045,000 |
| 6276987 |
Chemical mechanical polishing endpoint process control |
James Albert Gilhooly, Clifford Owen Morgan, III, Cong Wei |
2001-08-21 |
$21,309,000 |
| 6261851 |
Optimization of CMP process by detecting of oxide/nitride interface using IR system |
James Albert Gilhooly, Clifford Owen Morgan, III, Cong Wei |
2001-07-17 |
$23,321,000 |
| 6254453 |
Optimization of chemical mechanical process by detection of oxide/nitride interface using CLD system |
James Albert Gilhooly, Clifford Owen Morgan, III, Cong Wei |
2001-07-03 |
$26,086,000 |
| 6251784 |
Real-time control of chemical-mechanical polishing processing by monitoring ionization current |
James Albert Gilhooly, Clifford Owen Morgan, III, Cong Wei |
2001-06-26 |
$22,108,000 |
| 6228769 |
Endpoint detection by chemical reaction and photoionization |
James Albert Gilhooly, Clifford Owen Morgan, III, Cong Wei, Chienfan Yu |
2001-05-08 |
$26,391,000 |
| 6228280 |
Endpoint detection by chemical reaction and reagent |
James Albert Gilhooly, Clifford Owen Morgan, III, Cong Wei |
2001-05-08 |
$26,391,000 |
| 6213846 |
Real-time control of chemical-mechanical polishing processes using a shaft distortion measurement |
Xinhui Wang |
2001-04-10 |
$37,384,000 |
| 6194230 |
Endpoint detection by chemical reaction and light scattering |
James Albert Gilhooly, Clifford Owen Morgan, III, Cong Wei |
2001-02-27 |
$24,775,000 |
| 6180422 |
Endpoint detection by chemical reaction |
James Albert Gilhooly, Clifford Owen Morgan, III, Cong Wei, Chienfan Yu |
2001-01-30 |
$13,187,000 |
| 6176765 |
Accumulator for slurry sampling |
James Albert Gilhooly, Robert B. Lipori, Clifford Owen Morgan, III, William Joseph Surovic, Cong Wei |
2001-01-23 |
$22,404,000 |
