Issued Patents All Time
Showing 51–53 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5381234 | Method and apparatus for real-time film surface detection for large area wafers | Steven G. Barbee, Tony F. Heinz, Richard J. Lebel, Victor J. Silvestri | 1995-01-10 |
| 5338390 | Contactless real-time in-situ monitoring of a chemical etching process | Steven G. Barbee, Tony F. Heinz, Eugene H. Ratzlaff | 1994-08-16 |
| 5220405 | Interferometer for in situ measurement of thin film thickness changes | Steven G. Barbee, Victor J. Silvestri | 1993-06-15 |