Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5392124 | Method and apparatus for real-time, in-situ endpoint detection and closed loop etch process control | Steven G. Barbee, Tony F. Heinz, Ulrich Hofer, Leping Li | 1995-02-21 |
| 5386121 | In situ, non-destructive CVD surface monitor | Steven G. Barbee, Tony F. Heinz, Leping Li | 1995-01-31 |
| 5381234 | Method and apparatus for real-time film surface detection for large area wafers | Steven G. Barbee, Tony F. Heinz, Richard J. Lebel, Leping Li | 1995-01-10 |
| 5315151 | Transistor structure utilizing a deposited epitaxial base region | Chang-Ming Hsieh, Louis L. Hsu | 1994-05-24 |
| 5234535 | Method of producing a thin silicon-on-insulator layer | Klaus D. Beyer, Louis L. Hsu, Andrie S. Yapsir | 1993-08-10 |
| 5232866 | Isolated films using an air dielectric | Klaus D. Beyer, Andrie S. Yapsir | 1993-08-03 |
| 5227658 | Buried air dielectric isolation of silicon islands | Klaus D. Beyer, San-Mei Ku, Andrie S. Yapsir | 1993-07-13 |
| 5220405 | Interferometer for in situ measurement of thin film thickness changes | Steven G. Barbee, Leping Li | 1993-06-15 |
| 5159429 | Semiconductor device structure employing a multi-level epitaxial structure and method of manufacturing same | Robert E. Bendernagel, Kyong-Min Kim, Pavel Smetana, Thomas H. Strudwick, William H. White | 1992-10-27 |
| 5061652 | Method of manufacturing a semiconductor device structure employing a multi-level epitaxial structure | Robert E. Bendernagel, Kyong-Min Kim, Pavel Smetana, Thomas H. Strudwick, William H. White | 1991-10-29 |
| 4960717 | Fabrication of dielectrically isolated integrated circuit devices | Paul J. Tsang | 1990-10-02 |
| 4924284 | Method of trench filling | Klaus D. Beyer | 1990-05-08 |
| 4908691 | Selective epitaxial growth structure and isolation | Paul J. Tsang | 1990-03-13 |
| 4758531 | Method of making defect free silicon islands using SEG | Klaus D. Beyer, Louis L. Hsu, Dominic J. Schepis | 1988-07-19 |
| 4745081 | Method of trench filling | Klaus D. Beyer | 1988-05-17 |
| 4728624 | Selective epitaxial growth structure and isolation | Paul J. Tsang | 1988-03-01 |
| 4689656 | Method for forming a void free isolation pattern and resulting structure | D. Duan-Lee Tang | 1987-08-25 |
| 4680614 | Planar void free isolation structure | Klaus D. Beyer | 1987-07-14 |
| 4528047 | Method for forming a void free isolation structure utilizing etch and refill techniques | Klaus D. Beyer | 1985-07-09 |
| 4526631 | Method for forming a void free isolation pattern utilizing etch and refill techniques | D. Duan-Lee Tang | 1985-07-02 |
| 4473598 | Method of filling trenches with silicon and structures | Linda M. Ephrath, Denny Tang | 1984-09-25 |
| 4425574 | Buried injector memory cell formed from vertical complementary bipolar transistor circuits and method of fabrication therefor | Denny Tang, Siegfried K. Wiedmann | 1984-01-10 |
| 4381818 | Porous film heat transfer | Kenneth S. Sachar | 1983-05-03 |
| 4274891 | Method of fabricating buried injector memory cell formed from vertical complementary bipolar transistor circuits utilizing mono-poly deposition | Denny Tang, Siegfried K. Wiedmann | 1981-06-23 |