Issued Patents All Time
Showing 1–25 of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7416997 | Method of fabricating semiconductor device including removing impurities from silicon nitride layer | Sang Kyu Park, Sang-Woon Kim, Jae Hwan Kim | 2008-08-26 |
| 6958301 | Method for forming Ta2O5 dielectric layer by using in situ N2O plasma treatment | Han-Sang Song | 2005-10-25 |
| 6835658 | Method of fabricating capacitor with hafnium | Jong Min Lee, Hoon-Jung Oh | 2004-12-28 |
| 6794241 | Method for fabricating capacitor in semiconductor device | Hoon-Jung Oh, Jong-Bum Park | 2004-09-21 |
| 6784100 | Capacitor with oxidation barrier layer and method for manufacturing the same | Hoon-Jung Oh, Jong-Bum Park | 2004-08-31 |
| 6723598 | Method for manufacturing aluminum oxide films for use in semiconductor devices | Chan Lim, Yong Yu | 2004-04-20 |
| 6716717 | Method for fabricating capacitor of semiconductor device | Dong-Jun KIM | 2004-04-06 |
| 6709916 | Method for forming capacitor of semiconductor device | Kwang Jun Cho, Ki-Seon Park, Dong-Woo Shin | 2004-03-23 |
| 6706607 | Method for fabricating capacitor in semiconductor device | Jong-Bum Park, Hoon-Jung Oh | 2004-03-16 |
| 6699768 | Method for forming capacitor of semiconductor device | — | 2004-03-02 |
| 6682974 | Fabricating capacitor of semiconductor device | — | 2004-01-27 |
| 6673668 | Method of forming capacitor of a semiconductor memory device | Han-Sang Song, Ki-Seon Park | 2004-01-06 |
| 6653197 | Method for fabricating capacitor of semiconductor device | Kwang Jun Cho, Jong Min Lee | 2003-11-25 |
| 6635524 | Method for fabricating capacitor of semiconductor memory device | Ki-Seon Park | 2003-10-21 |
| 6632683 | Method for forming a capacitor of a semiconductor device | Ho-Jung Sun | 2003-10-14 |
| 6607963 | Method for forming capacitor of semiconductor device | Han-Sang Song | 2003-08-19 |
| 6589886 | Method for manufacturing aluminum oxide film for use in a semiconductor device | Min Soo Kim, Chan Lim, Heung Sik Kwak, Chung-Tae Kim | 2003-07-08 |
| 6559000 | Method of manufacturing a capacitor in a semiconductor device | Jong Min Lee, Chan Lim, Han-Sang Song | 2003-05-06 |
| 6537925 | Method for forming Ta2O5 dielectric layer using plasma enhanced atomic layer deposition | Jong Min Lee | 2003-03-25 |
| 6410381 | Method for forming capacitor of semiconductor device | Kyung Cheol Jeong, Han-Sang Song, Dong-Jun KIM | 2002-06-25 |
| 6365487 | Method of manufacturing a capacitor in a semiconductor device | Han-Sang Song, Dong-Jun KIM | 2002-04-02 |
| 6355516 | Method of manufacturing a capacitor with a bi-layer Ta2O5 capacitor dielectric in a semiconductor device including performing a plasma treatment on the first Ta2O5 layer | You Sung Kim, Chang Seo Park, Han-Sang Song, Ki-Seon Park, Chan Lim | 2002-03-12 |
| 6329237 | Method of manufacturing a capacitor in a semiconductor device using a high dielectric tantalum oxide or barium strontium titanate material that is treated in an ozone plasma | Chan Lim, Kil-Ho Lee, Ki-Seon Park | 2001-12-11 |
| 6326259 | Method of manufacturing a capacitor in a semiconductor device | Han-Sang Song, Dong-Jun KIM | 2001-12-04 |
| 6303427 | Method of manufacturing a capacitor in a semiconductor device | Han-Sang Song, You Sung Kim, Chan Lim, Chang Seo Park | 2001-10-16 |