Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4675072 | Trench etch endpoint detection by LIF | Reid S. Bennett, Geraldine C. Schwartz, Gary S. Selwyn | 1987-06-23 |
| 4473598 | Method of filling trenches with silicon and structures | Victor J. Silvestri, Denny Tang | 1984-09-25 |
| 4426274 | Reactive ion etching apparatus with interlaced perforated anode | — | 1984-01-17 |
| 4283249 | Reactive ion etching | — | 1981-08-11 |