Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6241576 | Shaping frame | — | 2001-06-05 |
| 5392124 | Method and apparatus for real-time, in-situ endpoint detection and closed loop etch process control | Steven G. Barbee, Tony F. Heinz, Leping Li, Victor J. Silvestri | 1995-02-21 |