Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6899784 | Apparatus for detecting CMP endpoint in acidic slurries | Leping Li, Steven G. Barbee, James Albert Gilhooly, Walter Imfeld, Werner Moser +4 more | 2005-05-31 |
| 6878629 | Method for detecting CMP endpoint in acidic slurries | Leping Li, Steven G. Barbee, James Albert Gilhooly, Xinhui Wang, Cong Wei | 2005-04-12 |
| 6500272 | System for and method of purging/venting a brush arm bearing | Christopher E. Harvey, Willi O. Kalvaitis, Davis H. Moquin | 2002-12-31 |
| 6273797 | In-situ automated CMP wedge conditioner | Kent R. Becker, Paul A. Manfredi, Douglas P. Nadeau | 2001-08-14 |
| 6247368 | CMP wet application wafer sensor | Willi O. Kalvaitis, Richard J. Lebel, Charles A. McKinney, Douglas P. Nadeau, Theodore G. van Kessel | 2001-06-19 |
| 6186873 | Wafer edge cleaning | Kent R. Becker, Stuart D. Cheney, Paul A. Manfredi, Eric J. White | 2001-02-13 |