Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5974868 | Downstream monitor for CMP brush cleaners | Donald M. DeCain, Cuc K. Huynh, Douglas P. Nadeau, Marc A. Taubenblatt | 1999-11-02 |
| 5834642 | Downstream monitor for CMP brush cleaners | Donald M. DeCain, Cuc K. Huynh, Douglas P. Nadeau, Marc A. Taubenblatt | 1998-11-10 |
| 5738568 | Flexible tilted wafer carrier | Richard J. Lebel, Matthew Miller | 1998-04-14 |
| 5704987 | Process for removing residue from a semiconductor wafer after chemical-mechanical polishing | Cuc K. Huynh, Matthew J. Rutten, Susan L. Cohen, Douglas P. Nadeau, James Albert Gilhooly | 1998-01-06 |