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2020-08-18 |
| 10016877 |
Printed chemical mechanical polishing pad having abrasives therein and system for printing |
Kasiraman Krishnan, Nag B. Patibandla |
2018-07-10 |
| 9731397 |
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Rajkumar Alagarsamy, Yongqi Hu, Simon Yavelberg, Christopher R. Mahon |
2017-08-15 |
| 9421666 |
Printed chemical mechanical polishing pad having abrasives therein |
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2016-08-23 |
| 8961266 |
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2015-02-24 |
| 7297239 |
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Ismail Emesh, Phillip M. Rayer, II, Bentley J. Palmer |
2007-11-20 |
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Ismail Emesh, Yakov Epshteyn, Guangshum Chen, Xingbo Yang |
2004-11-16 |
| 6802955 |
Method and apparatus for the electrochemical deposition and planarization of a material on a workpiece surface |
Ismail Emesh, Phillip M. Rayer, II, Bentley J. Palmer |
2004-10-12 |
| 6685537 |
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2003-06-24 |
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2002-02-26 |
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2001-04-10 |
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Anand Gupta, Chris Karlsrud, Daniel Ray Trojan, Jeffrey Butler Cunnane, Jon MacErnie |
2000-10-03 |
| 5954888 |
Post-CMP wet-HF cleaning station |
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1999-09-21 |
