Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10857655 | Substrate support plate with improved lift pin sealing | Gwo-Chuan Tzu, Xiaoxiong Yuan | 2020-12-08 |
| 9916994 | Substrate support with multi-piece sealing surface | Gwo-Chuan Tzu, Xiaoxiong Yuan | 2018-03-13 |
| 9837250 | Hot wall reactor with cooled vacuum containment | Joel M. Huston, Michael P. Karazim, Joseph Yudovsky | 2017-12-05 |
| 9783889 | Apparatus for variable substrate temperature control | Gwo-Chuan Tzu, Xiaoxiong Yuan, Amit Khandelwal, Avgerinos V. Gelatos, Kai Wu +1 more | 2017-10-10 |
| 9633889 | Substrate support with integrated vacuum and edge purge conduits | Gwo-Chuan Tzu | 2017-04-25 |
| 9543186 | Substrate support with controlled sealing gap | Joel M. Huston, Gwo-Chuan Tzu | 2017-01-10 |
| 9490150 | Substrate support for substrate backside contamination control | Gwo-Chuan Tzu, Yu Chang, Xiaoxiong Yuan | 2016-11-08 |
| 9478447 | Substrate support with wire mesh plasma containment | Gwo-Chuan Tzu | 2016-10-25 |
| 9202674 | Plasma reactor with a ceiling electrode supply conduit having a succession of voltage drop elements | Yu Chang, William Kuang, Anqing Cui, Seshadri Ganguli | 2015-12-01 |
| 8920564 | Methods and apparatus for thermal based substrate processing with variable temperature capability | Gwo-Chuan Tzu, Xiaoxiong Yuan, Amit Khandelwal, Benjamin C. Wang, Avgerinos V. Gelatos +3 more | 2014-12-30 |
| 8618446 | Substrate support with substrate heater and symmetric RF return | Yu-Chia Chang, Gwo-Chuan Tzu, Anqing Cui, William Kuang | 2013-12-31 |
| 8146896 | Chemical precursor ampoule for vapor deposition processes | Dien-Yeh Wu, Xiaoxiong Yuan | 2012-04-03 |