Issued Patents All Time
Showing 25 most recent of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347656 | Plasma processing apparatus | Yasushi Sonoda, Motohiro Tanaka, Koichi Yamamoto | 2025-07-01 |
| 12094687 | Plasma processing apparatus and plasma processing method | Masayuki Shiina, Tetsuo Ono | 2024-09-17 |
| 11978612 | Plasma processing apparatus | Isao Mori, Masaru Izawa, Norihiko Ikeda, Kazuya Yamada | 2024-05-07 |
| 11424105 | Plasma processing apparatus | Isao Mori, Masaru Izawa, Norihiko Ikeda, Kazuya Yamada | 2022-08-23 |
| 11417501 | Plasma processing apparatus and plasma processing method | Masayuki Shiina, Tetsuo Ono | 2022-08-16 |
| 11355315 | Plasma processing apparatus and plasma processing method | Norihiko Ikeda | 2022-06-07 |
| 11152192 | Plasma processing apparatus and method | Norihiko Ikeda, Tooru Aramaki, Yasuhiro Nishimori | 2021-10-19 |
| 11094512 | Plasma processing apparatus and plasma processing method | Kazuya Yamada, Koichi Yamamoto, Norihiko Ikeda, Isao Mori | 2021-08-17 |
| 11081320 | Plasma processing apparatus, plasma processing method, and ECR height monitor | Norihiko Ikeda, Kazuya Yamada | 2021-08-03 |
| 11004658 | Plasma processing apparatus and plasma processing method | Michikazu Morimoto, Yasuo Ohgoshi | 2021-05-11 |
| 10755897 | Plasma processing apparatus and plasma processing method | Norihiko Ikeda, Kazuya Yamada | 2020-08-25 |
| 10699884 | Plasma processing apparatus and plasma processing method | Kazuya Yamada, Koichi Yamamoto, Norihiko Ikeda, Isao Mori | 2020-06-30 |
| 10665516 | Etching method and plasma processing apparatus | Miyako Matsui, Kenichi Kuwahara, Masaru Izawa, Tatehito Usui, Takeshi Ohmori | 2020-05-26 |
| 10460913 | Plasma processing apparatus and plasma processing method | Nanako Tamari, Hitoshi Tamura | 2019-10-29 |
| 10217613 | Plasma processing apparatus | Tetsuo Kawanabe, Takumi Tandou, Tsutomu Tetsuka | 2019-02-26 |
| 10192718 | Plasma processing apparatus and plasma processing method | Michikazu Morimoto, Yasuo Ohgoshi | 2019-01-29 |
| 10037868 | Plasma processing apparatus | Koji Toyota, Koichi Yamamoto | 2018-07-31 |
| 9741579 | Plasma processing apparatus and plasma processing method | Nanako Tamari, Michikazu Morimoto | 2017-08-22 |
| 9502217 | Plasma processing apparatus and plasma processing method | Shunsuke Kanazawa, Michikazu Morimoto, Yasuo Ohgoshi | 2016-11-22 |
| 9390941 | Sample processing apparatus, sample processing system, and method for processing sample | Seiichi Watanabe, Yutaka Kozuma, Tooru Aramaki, Norihiko Ikeda, Hiroaki Takikawa | 2016-07-12 |
| 9336999 | Plasma processing apparatus and plasma processing method | Michikazu Morimoto, Yasuo Ohgoshi | 2016-05-10 |
| 8992724 | Plasma processing apparatus and plasma processing method | Shunsuke Kanazawa, Michikazu Morimoto, Yasuo Ohgoshi | 2015-03-31 |
| 8497213 | Plasma processing method | Seiichi Watanabe | 2013-07-30 |
| 8142674 | Plasma processing apparatus and plasma processing method | Hitoshi Tamura, Seiichi Watanabe | 2012-03-27 |
| 8075733 | Plasma processing apparatus | Seiichi Watanabe, Susumu Tauchi, Yasuhiro Nishimori | 2011-12-13 |