| 10670537 |
Systems and methods for defect material classification |
Guoheng Zhao, J. K. Leong |
2020-06-02 |
| 10234402 |
Systems and methods for defect material classification |
Guoheng Zhao, J. K. Leong |
2019-03-19 |
| 10025894 |
System and method to emulate finite element model based prediction of in-plane distortions due to semiconductor wafer chucking |
Pradeep Vukkadala, Sathish Veeraraghavan, Jaydeep Sinha, Haiguang Chen |
2018-07-17 |
| 9646379 |
Detection of selected defects in relatively noisy inspection data |
Haiguang Chen, Stephen Biellak, Jaydeep Sinha |
2017-05-09 |
| 9430593 |
System and method to emulate finite element model based prediction of in-plane distortions due to semiconductor wafer chucking |
Pradeep Vukkadala, Sathish Veeraraghavan, Jaydeep Sinha, Haiguang Chen |
2016-08-30 |
| 9355440 |
Detection of selected defects in relatively noisy inspection data |
Haiguang Chen, Stephen Biellak, Jaydeep Sinha |
2016-05-31 |
| 8422010 |
Methods and systems for determining a characteristic of a wafer |
Christopher F. Bevis, David L. Adler, Kris Bhaskar |
2013-04-16 |
| 8284394 |
Methods and systems for determining a characteristic of a wafer |
Christopher F. Bevis, David L. Adler, Kris Bhaskar |
2012-10-09 |
| 7796805 |
Defect detection |
Stephen Biellak, David W. Shortt |
2010-09-14 |
| 7711521 |
Methods and systems for detection of selected defects particularly in relatively noisy inspection data |
Sean F. Wu, Haiguang Chen |
2010-05-04 |
| 7373277 |
Methods and systems for detection of selected defects particularly in relatively noisy inspection data |
Sean F. Wu, Haiguang Chen |
2008-05-13 |
| 6310342 |
Optical microscope stage for scanning probe microscope |
David Braunstein, Quoc Ly, Thai Nguyen |
2001-10-30 |
| 6130427 |
Scanning probe microscope with multimode head |
Sang-Il Park, Frederick I. Linker, Ian R. Smith, John D. Alexander, Sung Il Park |
2000-10-10 |
| 6057546 |
Kinematically mounted probe holder for scanning probe microscope |
David Braunstein, Ouoc Ly, Thai Nguyen |
2000-05-02 |
| 5939719 |
Scanning probe microscope with scan correction |
Sang-Il Park, Ian R. Smith |
1999-08-17 |
| 5854487 |
Scanning probe microscope providing unobstructed top down and bottom up views |
David Braunstein, Quoc Ly, Thai Nguyen |
1998-12-29 |
| 5811821 |
Single axis vibration reducing system |
John D. Alexander |
1998-09-22 |
| 5672816 |
Large stage system for scanning probe microscopes and other instruments |
Sang-Il Park, Ian R. Smith |
1997-09-30 |
| RE35514 |
Scanning force microscope having aligning and adjusting means |
Thomas R. Albrecht, Moris Dovek, Sang-Il Park |
1997-05-20 |
| 5496999 |
Scanning probe microscope |
Frederick I. Linker, John D. Alexander, Sang-Il Park, Sung Il Park, Ian R. Smith +1 more |
1996-03-05 |
| 5444244 |
Piezoresistive cantilever with integral tip for scanning probe microscope |
Ian R. Smith, Marco Tortonese, Sean S. Cahill, Timothy G. Slater |
1995-08-22 |
| 5376790 |
Scanning probe microscope |
Frederick I. Linker, John D. Alexander, Sang-Il Park, Sung Il Park, Ian R. Smith |
1994-12-27 |
| 5157251 |
Scanning force microscope having aligning and adjusting means |
Thomas R. Albrecht, Moris Dovek, Sang-Il Park |
1992-10-20 |