Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854288 | Image determining device to determine the state of a subject | Tetsuya Yamamoto, Isao Totsuka, Tomoyuki Matsuyama, Masamitsu Yanagihara, Satoshi Hagiwara +1 more | 2023-12-26 |
| 11055522 | Image determining device to determine the state of a subject | Tetsuya Yamamoto, Isao Totsuka, Tomoyuki Matsuyama, Masamitsu Yanagihara, Satoshi Hagiwara +1 more | 2021-07-06 |
| 10275645 | Image determining device to determine the state of a subject | Tetsuya Yamamoto, Isao Totsuka, Tomoyuki Matsuyama, Masamitsu Yanagihara, Satoshi Hagiwara +1 more | 2019-04-30 |
| 10255491 | Guidance system, detection device, and position assessment device | Masakazu Sekiguchi, Tetsuya Yamamoto, Masamitsu Yanagihara, Satoshi Hagiwara, Isao Totsuka +1 more | 2019-04-09 |
| 9846371 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue +6 more | 2017-12-19 |
| 9268237 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue +6 more | 2016-02-23 |
| 9047751 | Image determining device to determine the state of a subject | Tetsuya Yamamoto, Isao Totsuka, Tomoyuki Matsuyama, Masamitsu Yanagihara, Satoshi Hagiwara +1 more | 2015-06-02 |
| 9019467 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue +6 more | 2015-04-28 |
| 8780326 | Exposure apparatus, exposure method, and device manufacturing method | Tohru Kiuchi, Takeyuki Mizutani, Masato Hamatani, Masahiko Okumura | 2014-07-15 |
| 8384880 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue +6 more | 2013-02-26 |
| 8208117 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue +6 more | 2012-06-26 |
| 8089611 | Exposure apparatus and method for producing device | Naoyuki Kobayashi | 2012-01-03 |
| 7834976 | Exposure apparatus and method for producing device | Naoyuki Kobayashi | 2010-11-16 |
| 7817244 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Hiroshi Chiba, Shigeru Hirukawa | 2010-10-19 |
| 7589820 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Dai Arai, Soichi Owa | 2009-09-15 |
| 7242455 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Hiroshi Chiba, Shigeru Hirukawa | 2007-07-10 |
| 6813004 | Exposure method, exposure apparatus and making method of the apparatus, and device and manufacturing method of the device | Takahiro Horikoshi, Takahisa Kikuchi | 2004-11-02 |
| 6549271 | Exposure apparatus and method | Masahiko Yasuda, Yuuki Ishii, Tetsuo Taniguchi | 2003-04-15 |
| 6492649 | Projection exposure apparatus, projection exposure method, optical cleaning method and method of fabricating semiconductor device | Taro Ogata | 2002-12-10 |
| 6342941 | Exposure apparatus and method preheating a mask before exposing; a conveyance method preheating a mask before exposing; and a device manufacturing system and method manufacturing a device according to the exposure apparatus and method | Kenichiro Kaneko, Hiroki Tateno, Jiro Inoue, Naomasa Shiraishi | 2002-01-29 |
| 5872618 | Projection exposure apparatus | Tadashi Nagayama, Yuuki Ishii, Tohru Kiuchi | 1999-02-16 |
| 5864386 | Exposure apparatus | — | 1999-01-26 |
| 5329336 | Exposure method and apparatus | Kazuhiro Hirano | 1994-07-12 |