| 9748072 |
Lower dose rate ion implantation using a wider ion beam |
Zhimin Wan, Rekha Padmanabhan, Xiao Bai, Gary N. Cai, Ching-I Li +4 more |
2017-08-29 |
| 9697988 |
Ion implantation system and process |
Zhimin Wan, Nicholas R. White |
2017-07-04 |
| 9431247 |
Method for ion implantation |
Zhimin Wan, Wilhelm P. Platow, Ger-Pin Lin, Ching-I Li, Rekha Padmanabhan +1 more |
2016-08-30 |
| 9281162 |
Single bend energy filter for controlling deflection of charged particle beam |
Nicholas R. White |
2016-03-08 |
| 9269528 |
Medium current ribbon beam for ion implantation |
Robert Kaim, Charles M. Free, David E. Hoglund, Wilhelm P. Platow |
2016-02-23 |
| 8237129 |
Microchannel plate devices with tunable resistive films |
Neal T. Sullivan, Anton Tremsin, Philippe de Rouffignac, David Beaulieu, Steve Bachman +2 more |
2012-08-07 |
| 7723707 |
Techniques for plasma injection |
Victor M. Benveniste, Gordon C. Angel, Bon-Woong Koo |
2010-05-25 |
| 7394079 |
Architecture for ribbon ion beam ion implanter system |
Peter L. Kellerman |
2008-07-01 |
| 7267520 |
Wafer scanning system with reciprocating rotary motion utilizing springs and counterweights |
Peter L. Kellerman, Victor M. Benveniste, Mehran Asdigha, Douglas Brown |
2007-09-11 |
| 6653803 |
Integrated resonator and amplifier system |
William F. DiVergilio, Ernst F. Scherer |
2003-11-25 |
| 6653643 |
Method and apparatus for improved ion acceleration in an ion implantation system |
William F. DiVergilio |
2003-11-25 |
| 6635890 |
Slit double gap buncher and method for improved ion bunching in an ion implantation system |
William F. DiVergilio |
2003-10-21 |
| 6608315 |
Mechanism for prevention of neutron radiation in ion implanter beamline |
Michael Graf, Edward K. McIntyre |
2003-08-19 |
| 6583429 |
Method and apparatus for improved ion bunching in an ion implantation system |
William F. DiVergilio |
2003-06-24 |
| 6291828 |
Glass-like insulator for electrically isolating electrodes from ion implanter housing |
David Swenson, William F. DiVergilio, Stephen M. Quinn, Zhimin Wan, Victor M. Benveniste |
2001-09-18 |
| 6208095 |
Compact helical resonator coil for ion implanter linear accelerator |
William F. DiVergilio, Stephen M. Quinn |
2001-03-27 |
| 6137112 |
Time of flight energy measurement apparatus for an ion beam implanter |
Edward K. McIntyre, Kevin W. Wenzel, David Swenson, Ernst F. Scherer, William F. DiVergilio |
2000-10-24 |