| 10446404 |
Electron-beam irradiated area adjustment method and adjustment system, electron-beam irradiated region correction method, and electron beam irradiation apparatus |
Ryo Tajima, Masahiro Hatakeyama, Kenichi Suematsu, Kenji Watanabe, Shoji Yoshikawa +2 more |
2019-10-15 |
| 10157722 |
Inspection device |
Masahiro Hatakeyama, Shoji Yoshikawa, Takeshi Murakami, Kenji Watanabe, Yoshihiko Naito +5 more |
2018-12-18 |
| 9852878 |
Surface processing apparatus |
Masahiro Hatakeyama, Kenichi Suematsu, Ryo Tajima, Kenji Terao, Shoji Yoshikawa |
2017-12-26 |
| 9601302 |
Inspection apparatus |
Shoji Yoshikawa, Takeshi Murakami, Masahiro Hatakeyama, Tsutomu Karimata |
2017-03-21 |
| 9134261 |
Inspection apparatus |
Shoji Yoshikawa, Takeshi Murakami, Masahiro Hatakeyama, Tsutomu Karimata |
2015-09-15 |
| 9105444 |
Electro-optical inspection apparatus and method with dust or particle collection function |
Kenji Watanabe, Masahiro Hatakeyama, Yoshihiko Naito, Tatsuya Kohama, Kenji Terao +4 more |
2015-08-11 |
| 8946629 |
Inspection apparatus |
Masahiro Hatakeyama, Yasushi Toma, Shoji Yoshikawa |
2015-02-03 |
| 8742344 |
Inspection apparatus |
Masahiro Hatakeyama, Yasushi Toma, Shoji Yoshikawa |
2014-06-03 |
| 8624182 |
Electro-optical inspection apparatus and method with dust or particle collection function |
Kenji Watanabe, Masahiro Hatakeyama, Yoshihiko Naito, Tatsuya Kohama, Kenji Terao +4 more |
2014-01-07 |
| 8497476 |
Inspection device |
Masahiro Hatakeyama, Shoji Yoshikawa, Takeshi Murakami, Kenji Watanabe, Yoshihiko Naito +5 more |
2013-07-30 |
| 6419462 |
Positive displacement type liquid-delivery apparatus |
Kuniaki Horie, Yukio Fukunaga, Akihisa Hongo, Kenji Kamoda, Hirotake Yamagishi +1 more |
2002-07-16 |
| 6387182 |
Apparatus and method for processing substrate |
Kuniaki Horie, Yukio Fukunaga, Naoaki Ogure, Tsutomu Nakada, Masahito Abe +3 more |
2002-05-14 |
| 6176929 |
Thin-film deposition apparatus |
Yukio Fukunaga, Hiroyuki Shinozaki, Mitsunao Shibasaki, Kuniaki Horie, Hiroyuki Ueyama +1 more |
2001-01-23 |
| 6116267 |
Valving device |
Hidenao Suzuki, Kuniaki Horie, Yuji Araki |
2000-09-12 |
| 6022413 |
Thin-film vapor deposition apparatus |
Hiroyuki Shinozaki, Yukio Fukunaga, Takeshi Murakami |
2000-02-08 |
| 5950646 |
Vapor feed supply system |
Kuniaki Horie, Hidenao Suzuki, Tsutomu Nakada, Takeshi Murakami, Yukio Fukunaga +5 more |
1999-09-14 |
| 5950925 |
Reactant gas ejector head |
Yukio Fukunaga, Hiroyuki Shinozaki, Masao Saitoh |
1999-09-14 |
| 5935337 |
Thin-film vapor deposition apparatus |
Noriyuki Takeuchi, Takeshi Murakami, Hiroyuki Shinozaki, Masaru Nakaniwa, Naoki Matsuda |
1999-08-10 |
| 5728223 |
Reactant gas ejector head and thin-film vapor deposition apparatus |
Takeshi Murakami, Noriyuki Takeuchi, Hiroyuki Shinozaki, Yukio Fukunaga, Akihisa Hongo |
1998-03-17 |