| 9892941 |
Multi-zone resistive heater |
Anqing Cui, Binh Tran, Alexander Tam, R. Suryanarayanan Iyer, Joseph Yudovsky +1 more |
2018-02-13 |
| 7781016 |
Method for measuring precursor amounts in bubbler sources |
Ronald Stevens, Brendan McDougall, Garry K. Kwong, Sandeep Nijhawan, Lori D. Washington |
2010-08-24 |
| 7674352 |
System and method for depositing a gaseous mixture onto a substrate surface using a showerhead apparatus |
David P. Bour, Lori D. Washington, Sandeep Nijhawan, Ronald Stevens, Alexander Tam +5 more |
2010-03-09 |
| 7601652 |
Method for treating substrates and films with photoexcitation |
Kaushal K. Singh, Sean M. Seutter, R. Suryanarayanan Iyer, Steve Ghanayem, Adam Brailove +2 more |
2009-10-13 |
| 7585769 |
Parasitic particle suppression in growth of III-V nitride films using MOCVD and HVPE |
David P. Bour, Sandeep Nijhawan, Lori D. Washington, David Eaglesham |
2009-09-08 |
| 7575982 |
Stacked-substrate processes for production of nitride semiconductor structures |
David P. Bour, Sandeep Nijhawan, Lori D. Washington, David Eaglesham |
2009-08-18 |
| 7560364 |
Dislocation-specific lateral epitaxial overgrowth to reduce dislocation density of nitride films |
David P. Bour, Sandeep Nijhawan, Lori D. Washington |
2009-07-14 |
| 7488690 |
Silicon nitride film with stress control |
R. Suryanarayanan Iyer, Andrew Lam, Yuji Maeda, Thomas C. Mele, Sean M. Seutter +3 more |
2009-02-10 |
| 7470599 |
Dual-side epitaxy processes for production of nitride semiconductor structures |
Sandeep Nijhawan, David Eaglesham, Lori D. Washington, David P. Bour |
2008-12-30 |
| 7459380 |
Dislocation-specific dielectric mask deposition and lateral epitaxial overgrowth to reduce dislocation density of nitride films |
David P. Bour, Sandeep Nijhawa, Lori D. Washington |
2008-12-02 |
| 7416995 |
Method for fabricating controlled stress silicon nitride films |
R. Suryanarayanan Iyer, Sanjeev Tandon |
2008-08-26 |
| 7399653 |
Nitride optoelectronic devices with backside deposition |
David P. Bour, Jie Su, Sandeep Nijhawan |
2008-07-15 |
| 7374960 |
Stress measurement and stress balance in films |
David P. Bour, Sandeep Nijhawan, Lori D. Washington |
2008-05-20 |
| 7364991 |
Buffer-layer treatment of MOCVD-grown nitride structures |
David P. Bour, Sandeep Nijhawan |
2008-04-29 |
