Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12203828 | Method and system for detecting anomalies in a semiconductor processing system | Ryan T. DOWNEY, Hemant P. Mungekar, Andreas Neuber, Michael W. Johnson, Joseph A. VAN GOMPEL +5 more | 2025-01-21 |
| 11768984 | Parameter sensing and computer modeling for gas delivery health monitoring | Ala Moradian, Shuran Sheng, Rohit Mahakali, Karthik Ramanathan, Lin Zhang +4 more | 2023-09-26 |
| 11551917 | Reduction of Br2 and Cl2 in semiconductor processes | Joseph A. VAN GOMPEL | 2023-01-10 |
| 10889891 | Apparatus for gaseous byproduct abatement and foreline cleaning | — | 2021-01-12 |
| 10861681 | Apparatus for collection and subsequent reaction of liquid and solid effluent into gaseous effluent | Ryan T. DOWNEY, David Muquing HOU, Yan Rozenzon | 2020-12-08 |
| 10757797 | Method and apparatus for gas abatement | Rongping Wang, Jibing Zeng, David Muquing HOU, Michael S. Cox, Zheng Yuan | 2020-08-25 |
| 10435787 | Hydrogen partial pressure control in a vacuum process chamber | Hari Ponnekanti | 2019-10-08 |
| 10187966 | Method and apparatus for gas abatement | Rongping Wang, Jibing Zeng, David Muquing HOU, Michael S. Cox, Zheng Yuan | 2019-01-22 |
| 9022715 | Load lock chamber designs for high-throughput processing system | Alexander S. Polyak, Christopher T. Lane, Susanne Schlaefer, Juergen Henrich, Josef T. Hoog +1 more | 2015-05-05 |