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Droplet generator steering system |
Peter Michael Baumgart, Abhiram Govindaraju, Chirag Rajyaguru |
2016-03-08 |
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6 KHz and above gas discharge laser system |
Richard C. Ujazdowski, Richard M. Ness, Vladimir B. Fleurov, Frederick Palenschat, Walter Dale Gillespie +4 more |
2014-10-07 |
| 8126027 |
Line narrowing module |
Robert A. Bergstedt, William N. Partlo, German E. Rylov, Richard L. Sandstrom |
2012-02-28 |
| 7838854 |
Method and apparatus for EUV plasma source target delivery |
Igor V. Fomenkov, Alexander I. Ershov, William N. Partlo, Richard L. Sandstrom, Oscar Hemberg +2 more |
2010-11-23 |
| 7589337 |
LPP EUV plasma source material target delivery system |
Alexander N. Bykanov, Oleh Khodykin, Oscar Hemberg, Norbert Bowering |
2009-09-15 |
| 7405416 |
Method and apparatus for EUV plasma source target delivery |
Igor V. Fomenkov, Alexander I. Ershov, William N. Partlo, Richard L. Sandstrom, Oscar Hemberg +2 more |
2008-07-29 |
| 7372056 |
LPP EUV plasma source material target delivery system |
Alexander N. Bykanov, Oleh Khodykin, Oscar Hemberg |
2008-05-13 |
| 7366219 |
Line narrowing module |
Robert A. Bergstedt, Walter Dale Gillespie, Vladimir Kulgeyko, William N. Partlo, German E. Rylov +3 more |
2008-04-29 |
| 7122816 |
Method and apparatus for EUV light source target material handling |
Oscar Hemberg, Tae Hoon Chung |
2006-10-17 |