Issued Patents All Time
Showing 1–25 of 77 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11257654 | Ion milling apparatus | Kengo Asai, Toru Iwaya, Hisayuki Takasu | 2022-02-22 |
| 11158481 | Ion milling device, ion source, and ion milling method | Kengo Asai, Hisayuki Takasu, Toru Iwaya | 2021-10-26 |
| 10971329 | Field ionization source, ion beam apparatus, and beam irradiation method | Shinichi Matsubara, Tomihiro Hashizume, Yoshimi Kawanami | 2021-04-06 |
| 10840070 | Ion beam device and cleaning method for gas field ion source | Yoshimi Kawanami, Atsushi Kobaru, Tomihiro Hashizume, Shinichi Matsubara | 2020-11-17 |
| 10662059 | Micro-electro-mechanical-systems processing method, and micro-electro-mechanical-systems processing apparatus | Keiji Watanabe, Misuzu Sagawa, Toshiyuki Mine, Daisuke Ryuzaki | 2020-05-26 |
| 10651006 | Ion beam apparatus | Shinichi Matsubara, Yoshimi Kawanami | 2020-05-12 |
| 10636623 | Ion beam device | Shinichi Matsubara, Yoshimi Kawanami, Hiroyuki Muto | 2020-04-28 |
| 10549989 | Microstructure manufacturing method and ION beam apparatus | Keiji Watanabe, Daisuke Ryuzaki | 2020-02-04 |
| 10546721 | Microstructure manufacturing method and microstructure manufacturing apparatus | Keiji Watanabe, Daisuke Ryuzaki | 2020-01-28 |
| 10366858 | Ion beam device | Shinichi Matsubara, Yoshimi Kawanami, Hiroyuki Muto | 2019-07-30 |
| 10361065 | Ion milling system | Kengo Asai, Toru Iwaya, Hisayuki Takasu | 2019-07-23 |
| 10340117 | Ion beam device and sample observation method | Shinichi Matsubara, Takashi Ohshima | 2019-07-02 |
| 10332722 | Ion milling device and ion milling method | Kengo Asai, Hisayuki Takasu, Toru Iwaya | 2019-06-25 |
| 10304657 | Mirror ion microscope and ion beam control method | Masaki Hasegawa, Teruo Kohashi, Shinichi Matsubara | 2019-05-28 |
| 10304653 | Ion milling device, ion source and ion milling method | Kengo Asai, Hisayuki Takasu, Toru Iwaya | 2019-05-28 |
| 10276341 | Control method and control program for focused ion beam device | Keiji Watanabe, Toshiyuki Mine, Masatoshi Morishita | 2019-04-30 |
| 10211022 | Ion beam apparatus and ion beam irradiation method | Shinichi Matsubara, Yoshimi Kawanami, Tomihiro Hashizume | 2019-02-19 |
| 10163602 | Ion beam system | Shinichi Matsubara, Yoshimi Kawanami | 2018-12-25 |
| 9761407 | Ion beam device and emitter tip adjustment method | Hiroyuki Muto, Yoshimi Kawanami, Shinichi Matsubara | 2017-09-12 |
| 9640360 | Ion source and ion beam device using same | Shinichi Matsubara, Yoichi Ose, Yoshimi Kawanami, Noriaki Arai | 2017-05-02 |
| 9508521 | Ion beam device | Shinichi Matsubara, Norihide Saho, Masahiro Yamaoka, Noriaki Arai | 2016-11-29 |
| 9111716 | Charged particle microscope | Shinichi Matsubara, Yoshimi Kawanami, Hiroyuki Tanaka, Yoichi Ose | 2015-08-18 |
| 8847173 | Gas field ion source and method for using same, ion beam device, and emitter tip and method for manufacturing same | Yoshimi Kawanami, Shinichi Matsubara, Hironori Moritani, Noriaki Arai, Tomihiro Hashizume +4 more | 2014-09-30 |
| 8796651 | Method and apparatus for specimen fabrication | Tohru Ishitani, Hidemi Koike, Kaoru Umemura, Eiichi Seya, Mitsuo Tokuda +3 more | 2014-08-05 |
| 8779380 | Ion beam device | Shinichi Matsubara, Norihide Saho, Masahiro Yamaoka, Noriaki Arai | 2014-07-15 |