| 10705439 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +12 more |
2020-07-07 |
| 10248033 |
Lithographic apparatus and device manufacturing method |
Jeroen Johannes Sophia Maria Mertens, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Antonius Johannus Van Der Net +4 more |
2019-04-02 |
| 9904185 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +12 more |
2018-02-27 |
| 9753380 |
Lithographic apparatus and device manufacturing method |
Jeroen Johannes Sophia Maria Mertens, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Antonius Johannus Van Der Net +4 more |
2017-09-05 |
| 9507278 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +12 more |
2016-11-29 |
| 9436097 |
Lithographic apparatus and device manufacturing method |
Jeroen Johannes Sophia Maria Mertens, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Antonius Johannus Van Der Net +4 more |
2016-09-06 |
| 9097992 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederick De Graaf, Christiaan Alexander Hoogendam +12 more |
2015-08-04 |
| 8934082 |
Lithographic apparatus and device manufacturing method |
Jeroen Johannes Sophia Maria Mertens, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Antonius Johannus Van Der Net +4 more |
2015-01-13 |
| 8913228 |
Lithographic apparatus and device manufacturing method |
Maurice Willem Jozef Etiënne Wijckmans, Martinus Agnes Willem Cuijpers, Martinus Hendrikus Antonius Leenders, Frits Van Der Meulen, Joost Jeroen Ottens +7 more |
2014-12-16 |
| 8446563 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +12 more |
2013-05-21 |
| 8004652 |
Lithographic apparatus and device manufacturing method |
Jeroen Johannes Sophia Maria Mertens, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Antonius Johannus Van Der Net +4 more |
2011-08-23 |
| 7602470 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christian Alexander Hoogendam +12 more |
2009-10-13 |
| 7532310 |
Apparatus, method for supporting and/or thermally conditioning a substrate, a support table, and a chuck |
Jeroen Johannes Sophia Maria Mertens, Aschwin Lodewijk Hendricus Johannes Van Meer, Joost Jeroen Ottens |
2009-05-12 |
| 7379155 |
Lithographic apparatus and device manufacturing method |
Jeroen Johannes Sophia Maria Mertens, Sjoerd Nicolaas Lambertus Donders, Roelof Frederick De Graaf, Christiaan Alexander Hoogendam, Antonius Johannus Van Der Net +4 more |
2008-05-27 |
| 7196768 |
Lithographic apparatus and device manufacturing method |
Joost Jeroen Ottens, Jeroen Johannes Sophia Maria Mertens, Frederik Eduard De Jong, Koen Goorman, Boris Menchtchikov |
2007-03-27 |