Issued Patents All Time
Showing 1–25 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12209310 | Concentration control using a bubbler | Ramesh Chandrasekharan, Erica Sakura Strandberg Pohl, Andrew Borth, Aleksey V. Altecor | 2025-01-28 |
| 12062554 | Progressive heating of components of substrate processing systems using TCR element-based heaters | Ramesh Chandrasekharan | 2024-08-13 |
| 11955366 | Pad raising mechanism in wafer positioning pedestal for semiconductor processing | Paul Konkola, Karl Leeser | 2024-04-09 |
| 11387136 | Pad raising mechanism in wafer positioning pedestal for semiconductor processing | Paul Konkola, Karl Leeser | 2022-07-12 |
| 11183400 | Progressive heating of components of substrate processing systems using TCR element-based heaters | Ramesh Chandrasekharan | 2021-11-23 |
| 11056380 | Wafer positioning pedestal for semiconductor processing | Paul Konkola, Karl Leeser | 2021-07-06 |
| 10872747 | Controlling showerhead heating via resistive thermal measurements | Nick Ray Linebarger, Jr., Curtis Bailey, Devon Pelkey | 2020-12-22 |
| 10870922 | Moment cancelling pad raising mechanism in wafer positioning pedestal for semiconductor processing | Paul Konkola, Karl Leeser | 2020-12-22 |
| 10699937 | Wafer positioning pedestal for semiconductor processing | Paul Konkola, Karl Leeser | 2020-06-30 |
| 10584415 | Temperature controlled showerhead | Henner Meinhold, Dan M. Doble, Stephen Yu-Hong Lau, Vince Wilson | 2020-03-10 |
| 10573549 | Pad raising mechanism in wafer positioning pedestal for semiconductor processing | Paul Konkola, Karl Leeser | 2020-02-25 |
| 10570515 | Moment cancelling pad raising mechanism in wafer positioning pedestal for semiconductor processing | Paul Konkola, Karl Leeser | 2020-02-25 |
| 10354909 | Wafer positioning pedestal for semiconductor processing | Paul Konkola, Karl Leeser | 2019-07-16 |
| 10221484 | Temperature controlled showerhead | Henner Meinhold, Dan M. Doble, Stephen Yu-Hong Lau, Vince Wilson | 2019-03-05 |
| 10121689 | Moment cancelling pad raising mechanism in wafer positioning pedestal for semiconductor processing | Paul Konkola, Karl Leeser | 2018-11-06 |
| 10020220 | Wafer positioning pedestal for semiconductor processing | Paul Konkola, Karl Leeser | 2018-07-10 |
| 9960068 | Moment cancelling pad raising mechanism in wafer positioning pedestal for semiconductor processing | Paul Konkola, Karl Leeser | 2018-05-01 |
| 9892956 | Wafer positioning pedestal for semiconductor processing | Paul Konkola, Karl Leeser | 2018-02-13 |
| 9670579 | Method for depositing a chlorine-free conformal SiN film | Dennis M. Hausmann, Jon Henri, Bart van Schravendijk | 2017-06-06 |
| 9476120 | Temperature controlled showerhead | Henner Meinhold, Dan M. Doble, Stephen Yu-Hong Lau, Vince Wilson | 2016-10-25 |
| 9230800 | Plasma activated conformal film deposition | Adrien LaVoie, Shankar Swaminathan, Hu Kang, Ramesh Chandrasekharan, Tom Dorsh +9 more | 2016-01-05 |
| 9070555 | Method for depositing a chlorine-free conformal sin film | Dennis M. Hausmann, Jon Henri, Bart van Schravendijk | 2015-06-30 |
| 8728956 | Plasma activated conformal film deposition | Adrien LaVoie, Shankar Swaminathan, Hu Kang, Ramesh Chandrasekharan, Tom Dorsh +9 more | 2014-05-20 |
| 8715788 | Method to improve mechanical strength of low-K dielectric film using modulated UV exposure | Ananda K. Bandyopadhyay, Seon-Mee Cho, Haiying Fu, David Mordo | 2014-05-06 |
| 8673080 | Temperature controlled showerhead | Henner Meinhold, Dan M. Doble, Stephen Yu-Hong Lau, Vince Wilson | 2014-03-18 |