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Chamferless via structures |
Mark L. Lenhardt, Frank W. Mont, Brown C. Peethala, Shariq Siddiqui, Jessica P. Striss |
2021-03-23 |
| 10937694 |
Chamferless via structures |
Mark L. Lenhardt, Frank W. Mont, Brown C. Peethala, Shariq Siddiqui, Jessica P. Striss |
2021-03-02 |
| 10903118 |
Chamferless via structures |
Mark L. Lenhardt, Frank W. Mont, Brown C. Peethala, Shariq Siddiqui, Jessica P. Striss |
2021-01-26 |
| 10388565 |
Chamferless via structures |
Mark L. Lenhardt, Frank W. Mont, Brown C. Peethala, Shariq Siddiqui, Jessica P. Striss |
2019-08-20 |
| 10032668 |
Chamferless via structures |
Mark L. Lenhardt, Frank W. Mont, Brown C. Peethala, Shariq Siddiqui, Jessica P. Striss |
2018-07-24 |
| 9799559 |
Methods employing sacrificial barrier layer for protection of vias during trench formation |
Shariq Siddiqui, Frank W. Mont, Xunyuan Zhang, Brown C. Peethala |
2017-10-24 |
| 9768113 |
Self aligned via in integrated circuit |
Yannick Feurprier, Joe Lee, Lars Liebmann, Yann Mignot, Terry A. Spooner +1 more |
2017-09-19 |
| 9613862 |
Chamferless via structures |
Mark L. Lenhardt, Frank W. Mont, Brown C. Peethala, Shariq Siddiqui, Jessica P. Striss |
2017-04-04 |
| 9385078 |
Self aligned via in integrated circuit |
Yannick Feurprier, Joe Lee, Lars Liebmann, Yann Mignot, Terry A. Spooner +1 more |
2016-07-05 |
| 9373543 |
Forming interconnect features with reduced sidewall tapering |
Frank W. Mont, Shariq Siddiqui, Brown C. Peethala |
2016-06-21 |
| 9373582 |
Self aligned via in integrated circuit |
Yannick Feurprier, Joe Lee, Lars Liebmann, Yann Mignot, Terry A. Spooner +1 more |
2016-06-21 |
| 9252051 |
Method for top oxide rounding with protection of patterned features |
Joe Lee, Yann Mignot |
2016-02-02 |
| 8476165 |
Method for thinning a bonding wafer |
Atsushi Yamashita |
2013-07-02 |
| 8202803 |
Method to remove capping layer of insulation dielectric in interconnect structures |
Yannick Feurprier |
2012-06-19 |
| 7772110 |
Electrical contacts for integrated circuits and methods of forming using gas cluster ion beam processing |
Rodney L. Robison |
2010-08-10 |
| 7279427 |
Damage-free ashing process and system for post low-k etch |
Masaru Nishino |
2007-10-09 |
| 6875477 |
Method for coating internal surface of plasma processing chamber |
Muneo Furuse |
2005-04-05 |
