| 10957588 |
Chamferless via structures |
Mark L. Lenhardt, Frank W. Mont, Shariq Siddiqui, Jessica P. Striss, Douglas M. Trickett |
2021-03-23 |
| 10937694 |
Chamferless via structures |
Mark L. Lenhardt, Frank W. Mont, Shariq Siddiqui, Jessica P. Striss, Douglas M. Trickett |
2021-03-02 |
| 10903118 |
Chamferless via structures |
Mark L. Lenhardt, Frank W. Mont, Shariq Siddiqui, Jessica P. Striss, Douglas M. Trickett |
2021-01-26 |
| 10658176 |
Methods of mitigating cobalt diffusion in contact structures and the resulting devices |
Frank W. Mont, Han You, Shariq Siddiqui |
2020-05-19 |
| 10388565 |
Chamferless via structures |
Mark L. Lenhardt, Frank W. Mont, Shariq Siddiqui, Jessica P. Striss, Douglas M. Trickett |
2019-08-20 |
| 10032668 |
Chamferless via structures |
Mark L. Lenhardt, Frank W. Mont, Shariq Siddiqui, Jessica P. Striss, Douglas M. Trickett |
2018-07-24 |
| 9934980 |
Rework and stripping of complex patterning layers using chemical mechanical polishing |
Jassem A. Abdallah, Raghuveer R. Patlolla |
2018-04-03 |
| 9799559 |
Methods employing sacrificial barrier layer for protection of vias during trench formation |
Shariq Siddiqui, Frank W. Mont, Xunyuan Zhang, Douglas M. Trickett |
2017-10-24 |
| 9613862 |
Chamferless via structures |
Mark L. Lenhardt, Frank W. Mont, Shariq Siddiqui, Jessica P. Striss, Douglas M. Trickett |
2017-04-04 |
| 9508560 |
SiARC removal with plasma etch and fluorinated wet chemical solution combination |
Yann Mignot, Shariq Siddiqui |
2016-11-29 |
| 9390967 |
Method for residue-free block pattern transfer onto metal interconnects for air gap formation |
Joe Lee, Yann Mignot |
2016-07-12 |
| 9378966 |
Selective etching of silicon wafer |
Spyridon Skordas, Da Song, Allan Upham, Kevin R. Winstel |
2016-06-28 |
| 9373543 |
Forming interconnect features with reduced sidewall tapering |
Frank W. Mont, Shariq Siddiqui, Douglas M. Trickett |
2016-06-21 |
| 9349687 |
Advanced manganese/manganese nitride cap/etch mask for air gap formation scheme in nanocopper low-K interconnect |
Stephen M. Gates, Elbert E. Huang, Joe Lee, Son V. Nguyen, Christopher J. Penny +1 more |
2016-05-24 |
| 9190285 |
Rework and stripping of complex patterning layers using chemical mechanical polishing |
Jassem A. Abdallah, Raghuveer R. Patlolla |
2015-11-17 |
