Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7711177 | Methods and systems for detecting defects on a specimen using a combination of bright field channel data and dark field channel data | Ashok Kulkarni | 2010-05-04 |
| 7656170 | Multiple directional scans of test structures on semiconductor integrated circuits | Gustavo A. Pinto, David L. Adler, Akella V. S. Satya, Robert Long, David J. Walker | 2010-02-02 |
| 7477372 | Optical scanning system for surface inspection | Mehrdad Nikoonahad, Keith Wells | 2009-01-13 |
| 7075637 | Optical scanning system for surface inspection | Mehrdad Nikoonahad, Keith Wells | 2006-07-11 |
| 7012439 | Multiple directional scans of test structures on semiconductor integrated circuits | Gustavo A. Pinto, David L. Adler, Akella V. S. Satya, Robert Long, David J. Walker | 2006-03-14 |
| 6888627 | Optical scanning system for surface inspection | Mehrdad Nikoonahad, Keith Wells | 2005-05-03 |
| 6867606 | Multiple directional scans of test structures on semiconductor integrated circuits | Gustavo A. Pinto, David L. Adler, Akella V. S. Satya, Robert Long, David J. Walker | 2005-03-15 |
| 6566885 | Multiple directional scans of test structures on semiconductor integrated circuits | Gustavo A. Pinto, David L. Adler, Akella V. S. Satya, Robert Long, David J. Walker | 2003-05-20 |
| 6445199 | Methods and apparatus for generating spatially resolved voltage contrast maps of semiconductor test structures | Akella V. S. Satya, Gustavo A. Pinto, Robert Long, Neil Richardson, Bin-Ming Benjamin Tsai | 2002-09-03 |
| 6433561 | Methods and apparatus for optimizing semiconductor inspection tools | Akella V. S. Satya, Gustavo A. Pinto, Robert Long, Bin-Ming Benjamin Tsai | 2002-08-13 |
| 6081325 | Optical scanning system for surface inspection | Mehrdad Nikoonahad, Keith Wells | 2000-06-27 |
| 5355212 | Process for inspecting patterned wafers | Keith Wells, Hung Nguyen, Ralph Johnson | 1994-10-11 |
| 5276498 | Adaptive spatial filter for surface inspection | Lee K. Galbraith, John L. Vaught, Ralph C. Wolf, Armand P. Neukermans | 1994-01-04 |
| 5083035 | Position location in surface scanning using interval timing between scan marks on test wafers | Jiri Pecen, Kenneth P. Gross, George Kren | 1992-01-21 |