Issued Patents All Time
Showing 1–25 of 70 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12422363 | Scanning scatterometry overlay metrology | Amnon Manassen, Yuri Paskover, Itay Gdor, Yonatan Vaknin, Yuval Lubashevsky | 2025-09-23 |
| 12379669 | Massive overlay metrology sampling with multiple measurement columns | Jonathan M. Madsen, Andrei V. Shchegrov, Amnon Manassen, Yossi Simon, Gilad Laredo +1 more | 2025-08-05 |
| 12327741 | Oscillating secondary stage for frame-mode overlay metrology | Izhar Agam, Yoram Uziel, Amnon Manassen, Daria Negri | 2025-06-10 |
| 12235588 | Scanning overlay metrology with high signal to noise ratio | Amnon Manassen, Vladimir Levinski | 2025-02-25 |
| 12066322 | Single grab overlay measurement of tall targets | Amnon Manassen, Yonatan Vaknin, Avner Safrani | 2024-08-20 |
| 12032300 | Imaging overlay with mutually coherent oblique illumination | Vladimir Levinski, Daria Negri, Amnon Manassen, Yonatan Vaknin | 2024-07-09 |
| 12001148 | Enhancing performance of overlay metrology | Amnon Manassen, Yonatan Vaknin, Yossi Simon, Daria Negri, Vladimir Levinski +9 more | 2024-06-04 |
| 11933717 | Sensitive optical metrology in scanning and static modes | Amnon Manassen, Yoram Uziel, Yossi Simon, Gilad Laredo | 2024-03-19 |
| 11899375 | Massive overlay metrology sampling with multiple measurement columns | Jonathan M. Madsen, Andrei V. Shchegrov, Amnon Manassen, Yossi Simon, Gilad Laredo +1 more | 2024-02-13 |
| 11852590 | Systems and methods for metrology with layer-specific illumination spectra | Amnon Manassen, Daria Negri, Ohad Bachar, Vladimir Levinski, Yuri Paskover | 2023-12-26 |
| 11841621 | Moiré scatterometry overlay | Vladimir Levinski, Amnon Manassen, Yuri Paskover | 2023-12-12 |
| 11800212 | Multi-directional overlay metrology using multiple illumination parameters and isolated imaging | Yonatan Vaknin, Amnon Manassen | 2023-10-24 |
| 11719533 | Modulation of scanning velocity during overlay metrology | David L. Brown, Amnon Manassen | 2023-08-08 |
| 11662562 | Broadband illumination tuning | Avi Abramov, Amit Shaked, Valery Garmider | 2023-05-30 |
| 11592755 | Enhancing performance of overlay metrology | Amnon Manassen, Yonatan Vaknin, Yossi Simon, Daria Negri, Vladimir Levinski +9 more | 2023-02-28 |
| 11531275 | Parallel scatterometry overlay metrology | Amnon Manassen, Dmitry Gorelik | 2022-12-20 |
| 11526086 | Multi-field scanning overlay metrology | Amnon Manassen | 2022-12-13 |
| 11512948 | Imaging system for buried metrology targets | Gilad Laredo, Amnon Manassen, Avner Safrani | 2022-11-29 |
| 11428642 | Scanning scatterometry overlay measurement | Amnon Manassen | 2022-08-30 |
| 11359916 | Darkfield imaging of grating target structures for overlay measurement | Amnon Manassen | 2022-06-14 |
| 11346657 | Measurement modes for overlay | Amnon Manassen, Gilad Laredo | 2022-05-31 |
| 11313669 | Systems and methods for optimizing focus for imaging-based overlay metrology | Amnon Manassen | 2022-04-26 |
| 11300405 | Grey-mode scanning scatterometry overlay metrology | Amnon Manassen | 2022-04-12 |
| 11300524 | Pupil-plane beam scanning for metrology | Amnon Manassen, Avi Abramov, Asaf Granot, Andrei V. Shchegrov | 2022-04-12 |
| 11187838 | Spectral filter for high-power fiber illumination sources | Ohad Bachar, Avi Abramov, Amnon Manassen | 2021-11-30 |