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Etay Lavert, Amnon Manassen, Yossi Simon, Dimitry Sanko |
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| 11908722 |
Automatic teaching of substrate handling for production and process-control tools |
Shai Mark, Amir Aizen, Maor Arbit |
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| 11774866 |
Active reticle carrier for in situ stage correction |
Adi Pahima, Ron Rudoi, Shai Mark |
2023-10-03 |
| 11556738 |
System and method for determining target feature focus in image-based overlay metrology |
Etay Lavert, Amnon Manassen, Yossi Simon, Dimitry Sanko |
2023-01-17 |
| 11512948 |
Imaging system for buried metrology targets |
Andrew V. Hill, Gilad Laredo, Amnon Manassen |
2022-11-29 |
| 10782120 |
Dual-interferometry wafer thickness gauge |
— |
2020-09-22 |
| 10354373 |
System and method for photomask alignment and orientation characterization based on notch detection |
Ron Rudoi |
2019-07-16 |
| 10190867 |
Real time dual mode full-field optical coherence microscopy with full range imaging |
Ibrahim Abdulhalim |
2019-01-29 |
| 10126582 |
SWIR to visible up-conversion optical system |
Ibrahim Abdulhalim, Viki Magen, Gabby Sarusi |
2018-11-13 |
| 9880377 |
Multiple wavelengths real time phase shift interference microscopy |
Michael Ney, Ibrahim Abdulhalim |
2018-01-30 |
| 9310186 |
True-spectroscopic dual mode high resolution full-field optical coherence tomography using liquid crystal devices |
Ibrahim Abdulhalim |
2016-04-12 |
| 8235322 |
Handling excess optical fiber |
Yeshayahu Zalitzky |
2012-08-07 |
| 8094979 |
Polarization-based optical switching |
Moshe Gottlieb |
2012-01-10 |
| 7813600 |
Mechanical optical switch |
Moshe Gottlieb |
2010-10-12 |