Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12062567 | Systems and methods for substrate support temperature control | Zubin Huang, Rui Cheng, Diwakar Kedlaya, Satish Radhakrishnan, Venkatanarayana Shankaramurthy +3 more | 2024-08-13 |
| 11841692 | Variable loop control feature | Venkatanarayana Shankaramurthy, Brett Berens, Mitesh Sanghvi, Shuang Liu | 2023-12-12 |
| 11714430 | Process fluid path switching in recipe operations | Mitesh Sanghvi, Venkatanarayana Shankaramurthy, Peter Standish, Thorsten Kril, Chahal Neema +2 more | 2023-08-01 |
| 11532525 | Controlling concentration profiles for deposited films using machine learning | Aykut Aydin, Zubin Huang, Rui Cheng, Yi Yang, Diwakar Kedlaya +3 more | 2022-12-20 |
| 11487304 | Process fluid path switching in recipe operations | Mitesh Sanghvi, Venkatanarayana Shankaramurthy, Peter Standish, Thorsten Kril, Chahal Neema +2 more | 2022-11-01 |
| 11449026 | Variable loop control feature | Venkatanarayana Shankaramurthy, Brett Berens, Mitesh Sanghvi, Shuang Liu | 2022-09-20 |
| 9337072 | Apparatus and method for substrate clamping in a plasma chamber | Ganesh Balasubramanian, Amit Kumar BANSAL, Eller Y. Juco, Mohamad A. Ayoub, Hyung Joon Kim +11 more | 2016-05-10 |