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Layer structure and use thereof to form a ceramic layer structure between an interconnect and a cathode of a high-temperature fuel cell |
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Method of preparing a coating solution and a corresponding use of the coating solution for coating a substrate |
Andreas Klipp, Stephan Wege, Tobias Mayer-Uhma, Cornelia Klein, Falko Schlenkrich |
2011-02-01 |
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Optical measurement system and method |
Oliver Genz, Ulrich Mantz |
2006-05-16 |
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Semiconductor structures and manufacturing methods |
Helmut Tews, Stephan Kudelka, Uwe Schroeder, Raj Jammy, Ulrike Gruening |
2004-05-25 |
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Etch process for recessing polysilicon in trench structures |
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2004-05-25 |
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Semiconductor structures and manufacturing methods |
Helmut Tews, Stephan Kudelka, Uwe Schroeder, Raj Jammy, Ulrike Gruening |
2003-08-12 |
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Single sided buried strap |
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2003-06-03 |
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Self-aligned buried strap for vertical transistors |
Jack A. Mandelman, Ulrike Gruening |
2003-04-29 |
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Integrated circuit trench device with a dielectric collar stack, and method of forming thereof |
Helmut Tews, Stephan Kudelka, Uwe Schroeder, Ulrike Gruening |
2002-11-26 |
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Collar formation by selective oxide deposition |
Jochen Beintner, Ulrike Gruening, Oswald Spindler, Zvonimir Gabric |
2002-08-06 |
| 6426253 |
Method of forming a vertically oriented device in an integrated circuit |
Helmut Tews, Brian Lee, Uwe Schroeder, Stephan Kudelka |
2002-07-30 |
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Method for expanding trenches by an anisotropic wet etch |
Stephen Kudelka, Dirk Tobben |
2002-07-30 |
| 6387771 |
Low temperature oxidation of conductive layers for semiconductor fabrication |
Oliver Genz |
2002-05-14 |
| 6352893 |
Low temperature self-aligned collar formation |
Stephan Kudelka, Jochen Beintner, Oliver Genz |
2002-03-05 |
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Integrated circuit vertical trench device and method of forming thereof |
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2002-01-01 |
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Method of forming a trench capacitor using a rutile dielectric material |
— |
2000-12-05 |
| 6103585 |
Method of forming deep trench capacitors |
Rajiv Ranade, Bertrand Flietner |
2000-08-15 |
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Buried strap poly etch back (BSPE) process |
Stephan Kudelka |
2000-05-23 |
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Measurement system and method for measuring critical dimensions using ellipsometry |
Oliver Genz, Ulrich Mantz |
2000-02-29 |
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Method and apparatus for evaluating internal film stress at high lateral resolution |
— |
1999-11-09 |
