Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11545338 | Charged particle beam apparatus and method of controlling sample charge | Dominik Ehberger, John Breuer | 2023-01-03 |
| 10168614 | On-axis illumination and alignment for charge control during charged particle beam inspection | Stefan Lanio | 2019-01-01 |
| 10156785 | Inspection of a lithographic mask that is protected by a pellicle | Alon Litman, Nir Ben-David Dodzin, Albert Karabekov | 2018-12-18 |
| 10153126 | System for discharging an area that is scanned by an electron beam | — | 2018-12-11 |
| 9673023 | System for discharging an area that is scanned by an electron beam | — | 2017-06-06 |
| 9366954 | Inspection of a lithographic mask that is protected by a pellicle | Alon Litman, Nir Ben-David Dodzin, Albert Karabekov | 2016-06-14 |
| 7800062 | Method and system for the examination of specimen | Radel Ben-Av, Asher Pearl, Igor Petrov, Nadav Haas, Pavel Adamec +1 more | 2010-09-21 |
| 7400390 | Inspection system and a method for aerial reticle inspection | Emanuel Elyasaf | 2008-07-15 |
| 7072502 | Alternating phase-shift mask inspection method and apparatus | Shirley Hemar, Gadi Greenberg, Mula Friedman, Boaz Kenan | 2006-07-04 |