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Automatic optical inspection using multiple objectives |
Gilad Almogy, Bryan Bolt, Oded Arnon, Ehud Tirosh, Michael Corliss |
2009-10-06 |
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Method and apparatus for article inspection including speckle reduction |
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2008-12-09 |
| 7394531 |
Apparatus and method for automatic optical inspection |
Ehud Tirosh |
2008-07-01 |
| 7355689 |
Automatic optical inspection using multiple objectives |
Gilad Almogy, Bryan Bolt, Oded Arnon, Ehud Tirosh, Michael Corliss |
2008-04-08 |
| 7133548 |
Method and apparatus for reticle inspection using aerial imaging |
Yair Eran, Avner Karpol, Emanuel Elyasaf, Ehud Tirosh |
2006-11-07 |
| 7072502 |
Alternating phase-shift mask inspection method and apparatus |
Shirley Hemar, Alex Goldenshtein, Gadi Greenberg, Mula Friedman |
2006-07-04 |
| 6924891 |
Method and apparatus for article inspection including speckle reduction |
Avner Karpol, Silviu Reinhorn, Emanuel Elysaf, Shimon Yalov |
2005-08-02 |
| 6798505 |
Method and apparatus for article inspection including speckle reduction |
Avner Karpol, Silviu Reinhorn, Emanuel Elyasaf, Shimon Yalov |
2004-09-28 |
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Method of and apparatus for article inspection including speckle reduction |
Avner Karpol, Silviu Reinhorn, Emanuel Elysaf, Shimon Yalov |
2003-07-01 |
| 6556294 |
Method of and apparatus for article inspection including speckle reduction |
Avner Karpol, Silviu Reinhorn, Emanuel Elysaf, Shimon Yalov |
2003-04-29 |
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Method and system for reticle inspection by photolithography simulation |
Avner Karpol |
2002-10-15 |
| 6429931 |
Method and apparatus for article inspection including speckle reduction |
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2002-08-06 |
| 6369888 |
Method and apparatus for article inspection including speckle reduction |
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2002-04-09 |
| 6268093 |
Method for reticle inspection using aerial imaging |
Yair Eran, Avner Karpol, Emanuel Elyasaf, Ehud Tirosh |
2001-07-31 |
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Image-setter for multiple media exposure |
Yosef Kamir, Zvi Zagagi |
1999-01-19 |
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Eliyahu Vronsky |
1997-01-14 |