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2008-12-09 |
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Method and apparatus for article inspection including speckle reduction |
Silviu Reinhorn, Emanuel Elysaf, Shimon Yalov, Boaz Kenan |
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| 6798505 |
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Emanuel Binnun |
2004-05-11 |
| 6587194 |
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2003-07-01 |
| 6556294 |
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| 6466315 |
Method and system for reticle inspection by photolithography simulation |
Boaz Kenan |
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| 6429931 |
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| 6369888 |
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Ran Zeimer |
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Amnon Ganot |
1994-05-10 |
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Optical system for focusing a light beam on to an image plane |
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1992-08-18 |
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1985-11-26 |