Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11441893 | Multi-spot analysis system with multiple optical probes | Prasanna Dighe, Dieter Mueller, Dong Chen, Dengpeng Chen, Steve Zamek +1 more | 2022-09-13 |
| 11119050 | Methods and systems for measurement of thick films and high aspect ratio structures | Noam Sapiens, Shankar Krishnan, David Y. Wang, Kerstin Purrucker, Kevin Peterlinz | 2021-09-14 |
| 10801953 | Semiconductor metrology based on hyperspectral imaging | David Y. Wang, Stilian Ivanov Pandev, Emanuel Saerchen, Andrei V. Shchegrov, Barry Blasenheim | 2020-10-13 |
| 10690602 | Methods and systems for measurement of thick films and high aspect ratio structures | Noam Sapiens, Shankar Krishnan, David Y. Wang, Kerstin Purrucker, Kevin Peterlinz | 2020-06-23 |
| 10648796 | Optical metrology with small illumination spot size | Noam Sapiens, Kevin Peterlinz, Kerstin Purrucker, Andrei V. Shchegrov | 2020-05-12 |
| 9921104 | Simultaneous multi-angle spectroscopy | Shankar Krishnan, Kerstin Purrucker, David Y. Wang | 2018-03-20 |
| 9915524 | Optical metrology with small illumination spot size | Noam Sapiens, Kevin Peterlinz, Kerstin Purrucker, Andrei V. Shchegrov | 2018-03-13 |
| 9091525 | Method for focusing an object plane and optical assembly | Wolfgang Sulik, Lambert Danner | 2015-07-28 |
| 7561263 | Apparatus for illuminating and inspecting a surface | Lambert Danner, Michael Heiden | 2009-07-14 |